Kinetics of evaporation of Cu beaded films on sapphire

被引：6
作者：
Beszeda, I
Ealet, B
Gontier-Moya, E
Beke, DL
Erdelyi, G
机构：
[1] Lajos Kossuth Univ, Dept Solid State Phys, H-4010 Debrecen, Hungary
[2] Fac Sci & Tech St Jerome, Lab SERMEC, F-13397 Marseille, France
来源：
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1998年 / 66卷 / 01期
关键词：
D O I：
10.1007/s003390050643
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Kinetics of evaporation of beaded Cu films from a sapphire substrate at 2-3 x 10(-8) mbar were investigated by means of Auger electron spectroscopy in the temperature range 893-978 K. Measuring the time dependence of the normalized Auger intensity of Cu, we concluded that the process is controlled by a surface reaction at the perimeters of beads. From the temperature dependence of the initial and final parts of these curves we were able to determine the energy of activation of the desorption of Cu and of the surface reaction as well.
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页码：93 / 98
页数：6
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