Large-scale Ag-nanoparticles/Al2O3/Au-nanograting hybrid nanostructure for surface-enhanced Raman scattering

被引：12

作者：

Wang, Yujin ^{[1
]}

Jin, Aizi ^{[1
]}

Quan, Baogang ^{[1
]}

Liu, Zhe ^{[1
]}

Li, Yunlong ^{[1
]}

Xia, Xiaoxiang ^{[1
]}

Li, Wuxia ^{[1
]}

Yang, Haifang ^{[1
]}

Gu, Changzhi ^{[1
]}

Li, Junjie ^{[1
]}

机构：

[1] Chinese Acad Sci, Inst Phys, Beijing Natl Lab Condensed Matter Phys, Beijing 100190, Peoples R China

来源：

MICROELECTRONIC ENGINEERING | 2017年 / 172卷

基金：

中国国家自然科学基金;

关键词：

Hybrid nanostructure; SERS; Local field enhancement; Multiple coupling systems; SPECTROSCOPY; MOLECULES; SERS; RESONANCE; ARRAYS;

D O I：

10.1016/j.mee.2017.01.024

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

There has been increasing interest in surface-enhanced Raman scattering (SERS) due to its ability in nondestructive and efficient detection of molecules. However, the fabrication of ideal SERS substrates with large-scale, strong and uniform 'hot spots' was always the challenge for the commercial use of SERS. Here, we designed an Ag-nanoparticles/Al2O3/Au-nanograting hybrid nanostructure as SERS substrate, in which the deep Au nanograting was formed by nanoimprint lithography (NIL) and metal deposition process, and the isolating layer of Al2O3 was deposited by atomic layer deposition (ALD) to form the large area precisely-controlled nanogaps between nanoparticles and nanograting. This hybrid nanostructure utilized the deep metal grating and further the strong local field from multiple coupling systems to realize large-scale and uniform "hot spots". The optimized hybrid structure substrates showed a highly uniform field enhancement, with the enhancement factor of similar to 52 x 10(7) and the sensitivity of similar to 10(-9) M, which manifested their potential and promising application in commercial use of SERS. (C) 2017 Elsevier B.V. All rights reserved.

引用

页码：1 / 7

页数：7

共 33 条

[1] Plasmonic Amplifiers: Engineering Giant Light Enhancements by Tuning Resonances in Multiscale Plasmonic Nanostructures [J].