Energy resolved actinometry for simultaneous measurement of atomic oxygen densities and local mean electron energies in radio-frequency driven plasmas

被引：40

作者：

Greb, Arthur ^{[1
]}

Niemi, Kari ^{[1
]}

O'Connell, Deborah ^{[1
]}

Gans, Timo ^{[1
]}

机构：

[1] Univ York, Dept Phys, York Plasma Inst, York YO10 5DD, N Yorkshire, England

来源：

APPLIED PHYSICS LETTERS | 2014年 / 105卷 / 23期

基金：

英国工程与自然科学研究理事会;

关键词：

2-PHOTON ABSORPTION; OPTICAL-EMISSION; SPECTROSCOPY; EXCITATION; PRESSURE; IMPACT; JET;

D O I：

10.1063/1.4903931

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A diagnostic method for the simultaneous determination of atomic oxygen densities and mean electron energies is demonstrated for an atmospheric pressure radio-frequency plasma jet. The proposed method is based on phase resolved optical emission measurements of the direct and dissociative electron-impact excitation dynamics of three distinct emission lines, namely, Ar 750.4 nm, O 777.4 nm, and O 844.6 nm. The energy dependence of these lines serves as basis for analysis by taking into account two line ratios. In this frame, the method is highly adaptable with regard to pressure and gas composition. Results are benchmarked against independent numerical simulations and two-photon absorption laser-induced fluorescence experiments. (C) 2014 Author(s).

引用

页数：4

共 28 条

[1]

Adbel-Rahman M., 2006, PLASMA SOURCES SCI T, V15, P620

[2]

[Anonymous], PLASM SCI ADV KNOWL

[3] OXYGEN ATOM ACTINOMETRY REINVESTIGATED - COMPARISON WITH ABSOLUTE MEASUREMENTS BY RESONANCE-ABSORPTION AT 130 NM [J].

BOOTH, JP ;

JOUBERT, O ;

PELLETIER, J ;

SADEGHI, N .

JOURNAL OF APPLIED PHYSICS, 1991, 69 (02) :618-626

[4]

Bredin J., APPL PHYS LETT UNPUB

[5] Measurement of electron-impact excitation into the 3p54p levels of argon using Fourier-transform spectroscopy [J].

Chilton, JE ;

Boffard, JB ;

Schappe, RS ;

Lin, CC .

PHYSICAL REVIEW A, 1998, 57 (01) :267-277

[6] OPTICAL-EMISSION SPECTROSCOPY OF REACTIVE PLASMAS - A METHOD FOR CORRELATING EMISSION INTENSITIES TO REACTIVE PARTICLE DENSITY [J].

COBURN, JW ;

CHEN, M .

JOURNAL OF APPLIED PHYSICS, 1980, 51 (06) :3134-3136

[7] Use of particle-in-cell simulations to improve the actinometry technique for determination of absolute atomic oxygen density [J].

Conway, J. ;

Kechkar, S. ;

Connor, N. O' ;

Gaman, C. ;

Turner, M. M. ;

Daniels, S. .

PLASMA SOURCES SCIENCE & TECHNOLOGY, 2013, 22 (04)

[8]

d'Agostino R, 1981, PLASMA CHEM PLASMA P, V1, P365

[9] SPECTROSCOPIC DIAGNOSTICS OF CF4-O2 PLASMAS DURING SI AND SIO2 ETCHING PROCESSES [J].

DAGOSTINO, R ;

CRAMAROSSA, F ;

DEBENEDICTIS, S ;

FERRARO, G .

JOURNAL OF APPLIED PHYSICS, 1981, 52 (03) :1259-1265

[10] Atomic oxygen densities in a downstream microwave O2/Ar plasma source [J].

Ershov, Alexander ;

Borysow, Jacek .

PLASMA SOURCES SCIENCE & TECHNOLOGY, 2007, 16 (04) :798-802

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