The comparative studies of HF CVD diamond films by Raman and XPS spectroscopies

被引：32

作者：

Paprocki, Kazimierz ^{[1
]}

Dittmar-Wituski, Adam ^{[2
]}

Trzcinski, Marek ^{[2
]}

Szybowicz, Miroslaw ^{[3
]}

Fabisiak, Kazimierz ^{[1
]}

Dychalska, Anna ^{[3
]}

机构：

[1] Kazimierz Wielki Univ, Inst Phys, Powstancow Wielkopolskich 2, PL-85090 Bydgoszcz, Poland

[2] Univ Sci & Technol, Inst Math & Phys, Ul Kaliskiego 7, PL-85796 Bydgoszcz, Poland

[3] Poznan Univ Tech, Fac Tech Phys, Piotrowo 3, PL-60965 Poznan, Poland

来源：

OPTICAL MATERIALS | 2019年 / 95卷

关键词：

CVD diamond; Laser Raman spectroscopy; XPS; PHOTOELECTRON-SPECTROSCOPY; CARBON; HYDROGEN;

D O I：

10.1016/j.optmat.2019.109251

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

One of the most attractive features of diamond is its robust p-type surface conductivity that develops under atmospheric conditions on hydrogen-terminated samples. The as-grown CVD diamond films are H-terminated and H concentration depends on the ratios of sp(2)/sp(3) carbon bonding. It is well known that the sp(2)/sp(3) ratios in CVD diamond films is the key factor determining their physical properties and especially their electrical properties therefore the proper determination of the phase composition of CVD diamond films appear as a very important problem. The article presents results for seven diamond synthesized by HF CVD method layers analyzed by Scanning Electron Microscopy (SEM), laser Raman spectroscopy (LRS) and X-ray photoelectron spectroscopy (XPS). Values for the ratio of sp(2)/sp(3) bonded carbon in the various films were obtained using XPS and LRS methods.

引用

页数：5

共 18 条

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