Chromium interlayers as a tool for enhancing diamond adhesion on copper

被引:41
作者
Ali, N
Ahmed, W
Rego, CA
Fan, QH
机构
[1] Manchester Metropolitan Univ, Dept Chem & Mat, Manchester M1 5GD, Lancs, England
[2] Univ Aveiro, Dept Phys, P-3810 Aveiro, Portugal
关键词
D O I
10.1016/S0925-9635(00)00266-1
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Diamond films on copper suffer from poor adhesion, mainly due to the lack of affinity between carbon and copper. In this study a chromium (Cr) interlayer has been employed to improve the adhesion between the diamond films and the copper substrates. The Cr interlayer, a carbide-forming material, plays the role of an adhesive between the diamond him and the copper substrate. A hot filament chemical vapour deposition (HFCVD) system, modified to enable the substrate to be negatively biased has been used to deposit diamond. It was observed that diamond nucleation together with the deposition rate increased with bias time. A bias time of 5 min was sufficient to increase diamond nucleation and enhance the growth rate. The diamond films deposited exhibited predominantly [111] orientation, as evident from the SEM micrographs. Diamond films grown on the Cr-coated Cu substrates gave reasonable adhesion values. Pull-off tests showed that the adhesion was better than the strength of the adhesive employed, similar to 14 MPa. Scratch tests revealed a critical load of similar to 7 N with unbiased samples, while the critical load increased significantly to similar to 38 N for samples pre-treated at -259 V for 15 min. Furthermore, it was found from Raman analysis that films with better adhesion exhibited greater Raman shift of the 1332 cm(-1) diamond peak. The overall results suggest that Cr is an effective interlayer for producing adherent diamond coatings onto Cu substrates. (C) 2000 Elsevier Science S.A. All rights reserved.
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收藏
页码:1464 / 1470
页数:7
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