Upgrade of long trace profiler for characterization of high-precision X-ray mirrors at SPring-8

被引：42

作者：

Senba, Y. ^{[1
]}

Kishimoto, H. ^{[1
]}

Ohashi, H. ^{[1
,2
]}

Yumoto, H. ^{[1
]}

Zeschke, T. ^{[3
]}

Siewert, F. ^{[3
]}

Goto, S. ^{[1
,2
]}

Ishikawa, T. ^{[1
,2
]}

机构：

[1] SPring 8, Japan Synchrotron Radiat Res Inst, Sayo, Hyogo 6795198, Japan

[2] SPring 8, RIKEN, Sayo, Hyogo 6795148, Japan

[3] BESSY II, Helmholtz Zentrum Berlin, D-12489 Berlin, Germany

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT | 2010年 / 616卷 / 2-3期

关键词：

Long trace profiler; Surface profile measurement; Optical metrology; X-ray mirror; Synchrotron radiation; BESSY;

D O I：

10.1016/j.nima.2009.12.007

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The long trace profiler (LTP) at SPring-8 has been upgraded to improve stability and resolution of slope measurement. The performances of the upgraded LTP at SPring-8 are presented by cross-checking measurements on a flat mirror with data obtained using Nanometer Optical Component Measuring Machine (NOM) at the Helmholtz Zentrum Berlin / BESSY-II. (C) 2009 Elsevier B.V. All rights reserved.

引用

页码：237 / 240

页数：4