Microfabricated capillarity-driven stop valve and sample injector

被引:92
作者
Man, PF [1 ]
Mastrangelo, CH [1 ]
Burns, MA [1 ]
Burke, DT [1 ]
机构
[1] Univ Michigan, Dept Elect Engn, Ctr Integrated Sensors & Circuits, Ann Arbor, MI 48109 USA
来源
MICRO ELECTRO MECHANICAL SYSTEMS - IEEE ELEVENTH ANNUAL INTERNATIONAL WORKSHOP PROCEEDINGS | 1998年
关键词
D O I
10.1109/MEMSYS.1998.659727
中图分类号
TP [自动化技术、计算机技术];
学科分类号
0812 ;
摘要
This paper presents the design, fabrication, and testing of passive plastic microfluidic valves and active injectors driven by capillary forces. The passive valves stop the flow of a liquid inside a capillary using a capillary pressure barrier that develops when the channel cross section changes abruptly. Two types of valves with vertical and horizontal neck regions were fabricated yielding pressure barriers ranging from 1-6 kPa. Introducting asymmetry in the neck region, unidirectional valving action was achieved. The passive valving devices were used in combination with two electrodes to implement a sample injector. The injector uses an electrolytically-generated O-2 bubble that raises the liquid pressure beyond the barrier thus reestablishing flow with as little as 150 mu W Of electrical power.
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页码:45 / 50
页数:4
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