RF MEMS switches for smart antennas

被引：24

作者：

Pal, Jitendra ^{[1
]}

Zhu, Yong ^{[1
]}

Lu, Junwei ^{[1
]}

Dzung Viet Dao ^{[1
]}

Khan, Fahimullah ^{[1
]}

机构：

[1] Griffith Univ, Southport, Qld 4215, Australia

来源：

MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS | 2015年 / 21卷 / 02期

关键词：

Electrostatic actuators - Electric switches - Microwave antennas - Microelectromechanical devices - MEMS;

D O I：

10.1007/s00542-014-2111-1

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper novel V-shaped and Z-shaped thermally actuated radio frequency (RF) MicroElectroMechanical Systems (MEMS) switches are designed and fabricated for the application of smart antennas. The switches are driven by a metal electrothermal actuator, which is able to generate large displacement and high contact force at lower temperatures. The MEMS switches utilizing the parallel beam actuator achieved 8 mu m displacement. RF performances are improved by suspending the switching structures 25 mu m above the substrate, thereby reducing the loss in the substrate. ON state insertion loss of -0.42 dB at 10 GHz, OFF state isolation of -40 dB at 10 GHz and return loss better than of -20 dB at 10 GHz for bidirectional Z-shaped thermally actuated RF MEMS switch are achieved on the low resistivity silicon substrate.

引用

页码：487 / 495

页数：9

共 13 条

[1] A novel planar switched parasitic array antenna with steered conical pattern [J].