Molecular dynamics analysis of nanoimprinted Cu-Ni alloys

被引:27
作者
Fang, Te-Hua
Wu, Cheng-Da
Chang, Win-Jin [1 ]
机构
[1] Kun Shan Univ, Dept Mech Engn, Tainan 710, Taiwan
[2] Natl Formosa Univ, Inst Mech & Electromech Engn, Yunlin 632, Taiwan
[3] Natl Cheng Kung Univ, Dept Mech Engn, Tainan 701, Taiwan
关键词
nanoimprint; molecular dynamics; spring-back; residual stress; Cu-Ni;
D O I
10.1016/j.apsusc.2007.02.017
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
The nanoimprinted behaviors of Cu-Ni alloys were studied through molecular dynamics simulation. The results from the simulations showed that the punching force and the internal energy of the specimen increased rapidly with increasing punch position and both of they at the elevated temperature were lower than that at the low temperature. The punching force of the specimen with a lower Ni content was higher than that with a higher Ni content, while the internal energy of specimen was reverse. In addition, the spring-back phenomenon was more obvious with increasing Ni components of Cu-Ni alloy after the punch was retrieved during the nanoimprinting process and that induced a smaller residual stress within the specimens. (C) 2007 Elsevier B.V. All rights reserved.
引用
收藏
页码:6963 / 6968
页数:6
相关论文
共 23 条
[1]  
Cedeño CC, 2002, MICROELECTRON ENG, V61-2, P25, DOI 10.1016/S0167-9317(02)00505-1
[2]   Molecular-dynamics study of mechanical properties of nanoscale copper with vacancies under static and cyclic loading [J].
Chang, WJ .
MICROELECTRONIC ENGINEERING, 2003, 65 (1-2) :239-246
[3]   Influence of temperature on tensile and fatigue behavior of nanoscale copper using molecular dynamics simulation [J].
Chang, WJ ;
Fang, TH .
JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 2003, 64 (08) :1279-1283
[4]  
Chen Y., 2004, APPL PHYS A, V78, P1169
[5]   Imprint lithography with 25-nanometer resolution [J].
Chou, SY ;
Krauss, PR ;
Renstrom, PJ .
SCIENCE, 1996, 272 (5258) :85-87
[6]   IMPRINT OF SUB-25 NM VIAS AND TRENCHES IN POLYMERS [J].
CHOU, SY ;
KRAUSS, PR ;
RENSTROM, PJ .
APPLIED PHYSICS LETTERS, 1995, 67 (21) :3114-3116
[7]   Molecular dynamics study of phase separation kinetics in thin films [J].
Das, SK ;
Puri, S ;
Horbach, J ;
Binder, K .
PHYSICAL REVIEW LETTERS, 2006, 96 (01)
[8]   Simulated nanojet ejection process by spreading droplets on a solid surface [J].
Fang, TH ;
Chang, WJ ;
Liao, SC .
JOURNAL OF PHYSICS-CONDENSED MATTER, 2003, 15 (49) :8263-8270
[9]   Three-dimensional molecular dynamics analysis of processing using a pin tool on the atomic scale [J].
Fang, TH ;
Weng, CI .
NANOTECHNOLOGY, 2000, 11 (03) :148-153
[10]   BINDING-ENERGY OF IMAGE-POTENTIAL STATES - DEPENDENCE ON CRYSTAL-STRUCTURE AND MATERIAL [J].
GIESEN, K ;
HAGE, F ;
HIMPSEL, FJ ;
RIESS, HJ ;
STEINMANN, W .
PHYSICAL REVIEW B, 1987, 35 (03) :971-975