Measurement of longitudinal piezoelectric coefficient of thin films by a laser-scanning vibrometer

被引：119
作者：
Yao, K [1 ]
Tay, FEH [1 ]
机构：
[1] Inst Mat Res & Engn, Singapore 117602, Singapore
来源：
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL | 2003年 / 50卷 / 02期
关键词：
D O I：
10.1109/TUFFC.2003.1182115
中图分类号：
O42 [声学];
学科分类号：
070206 ; 082403 ;
摘要：
A laser scanning vibrometer (LSV) was used for the first time to measure the piezoelectric coefficient of ferroelectric thin films based on the converse piezoelectric effect. The significant advantages of the use of the LSV for this purpose were demonstrated. Several key points were discussed in order to achieve reliable and accurate results.
引用
收藏
页码：113 / 116
页数：4
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