YBa2Cu3O7-δ Superconducting Films Prepared by Low Pressure Post-annealing

被引:0
作者
Wang, Lianhong [1 ]
Liu, Chong [1 ]
Fan, Jing [1 ]
机构
[1] Chinese Acad Sci, Inst Mech, State Key Lab High Temp Gas Dynam, Beijing 100190, Peoples R China
来源
PROCEEDINGS OF THE 29TH INTERNATIONAL SYMPOSIUM ON RAREFIED GAS DYNAMICS | 2014年 / 1628卷
关键词
YBa2Cu3O7-delta; superconducting films; low pressure; post-annealing; DEPOSITION; DIFFUSION; OXYGEN;
D O I
10.1063/1.4902627
中图分类号
O59 [应用物理学];
学科分类号
摘要
YBa2Cu3O7-delta precursor films are deposited on 2 '' LaAlO3 wafer by the co-evaporation technique using Y, BaF2 and Cu as evaporation sources. After deposition, the films are annealed at low-pressure atmosphere with the composition of oxygen and water vapour. Compared with the normal pressure annealing, it is shown that low pressure can greatly improve the superconducting properties of 2 '' YBCO films with thickness larger than 500 nm, as the microcrack on films surface becomes unobservable the microwave surface resistance is greatly reduced. Furthermore, it is also revealed that the optimal processing window for making high quality superconducting YBCO films through ex-situ process is relatively small, therefore the ambient in annealing furnace is crucial important and should be precisely controlled.
引用
收藏
页码:446 / 450
页数:5
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