The low-field density peak in helicon discharges

被引:70
作者
Chen, FF [1 ]
机构
[1] Univ Calif Los Angeles, Dept Elect Engn, Los Angeles, CA 90095 USA
关键词
D O I
10.1063/1.1575755
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
Although the density n in helicon discharges increases monotonically with magnetic field B for B larger than a few hundred gauss, as expected from theory, a pronounced density peak is often observed at Bsimilar to50 G or below. A peak in antenna loading is indeed found in computations using a fluid code as long as reflections from an endplate are taken into account. Various tests show that this peak is caused by constructive interference from the reflected wave. This effect can be used in the design of compact helicon plasma injectors. In addition, it can be the cause of density enhancements previously observed using cusped magnetic fields or aperture limiters. (C) 2003 American Institute of Physics.
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页码:2586 / 2592
页数:7
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