共 15 条
- [2] Chang J.P., 2002, Lecture Notes on Principles of Plasma Processing
- [3] EXPERIMENTS ON HELICON PLASMA SOURCES [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1992, 10 (04): : 1389 - 1401
- [5] EXPERIMENTAL MODELING OF INDUCTIVE DISCHARGES [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1993, 11 (04): : 1165 - 1171
- [7] The role of the lower hybrid resonance in helicon plasmas [J]. PHYSICS OF PLASMAS, 2000, 7 (01) : 417 - 423
- [10] Lieberman M. A., 1994, PRINCIPLES PLASMA DI