Microstructure and tribological properties of cubic boron nitride films on Si3N4 inserts via boron-doped diamond buffer layers

被引：21

作者：

Xu, F. ^{[1
,2
]}

Yuen, M. F. ^{[2
]}

He, B. ^{[2
]}

Wang, C. D. ^{[2
]}

Zhao, X. R. ^{[1
,3
]}

Tang, X. L. ^{[1
]}

Zuo, D. W. ^{[1
]}

Zhang, W. J. ^{[2
]}

机构：

[1] Nanjing Univ Aeronaut & Astronaut, Coll Mech & Elect Engn, Nanjing 210016, Peoples R China

[2] City Univ Hong Kong, Ctr Super Diamond & Adv Films, Hong Kong, Hong Kong, Peoples R China

[3] Taizhou Univ, Zhejiang Prov Key Lab Cutting Tools, Taizhou 318000, Peoples R China

来源：

基金：

中国国家自然科学基金;

关键词：

Cubic boron nitride film; Silicon nitride insert; Boron doped diamond; Tribological properties; CHEMICAL-VAPOR-DEPOSITION; MECHANICAL-PROPERTIES; TUNGSTEN CARBIDE; CBN FILMS; RESIDUAL-STRESS; COMPOSITE FILMS; THIN-FILMS; COATINGS; QUALITY; GROWTH;

D O I：

10.1016/j.diamond.2014.07.014

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Cubic boron nitride (cBN) coatings were deposited on silicon nitride (Si3N4) cutting inserts through conductive boron-doped diamond (BDD) buffer layers in an electron cyclotron resonance microwave plasma chemical vapor deposition (ECR MPCVD) system. The adhesion and crystallinity of cBN coatings were systematically characterized, and the influence of doping level of BDD on the phase composition and microstructure of the cBN coatings were studied. The nano-indentation tests showed that the hardness and elastic modulus of the obtained cBN coatings were 78 GPa and 732 GPa, respectively. The tribological properties of the cBN coatings were evaluated by using a ball-on-disc tribometer with Si3N4 as the counterpart. The coefficient of the friction and the wear rate of the cBN coatings were estimated to be about 0.17 and 4.1 x 10(-7) mm(3)/N m, respectively, which are remarkably lower than those of titanium aluminum nitride (TiAIN) coatings widely used in machining ferrous metal. The results suggest that cBN/BDD coated Si3N4 inserts may have great potentials for advanced materials machining. (C) 2014 Elsevier B.V. All rights reserved.

引用

页码：9 / 13

页数：5

共 37 条

[1] NCD by HFCVD on a Si3N4-bioglass composite for biomechanical applications [J].

Amaral, M ;

Salgueiredo, E ;

Oliveira, FJ ;

Fernandes, AJS ;

Costa, FM ;

Silva, RF .

SURFACE & COATINGS TECHNOLOGY, 2006, 200 (22-23) :6409-6413

[2] Spark plasma sintering: A powerful tool to develop new silicon nitride-based materials [J].

Belmonte, M. ;

Gonzalez-Julian, J. ;

Miranzo, P. ;

Osendi, M. I. .

JOURNAL OF THE EUROPEAN CERAMIC SOCIETY, 2010, 30 (14) :2937-2946

[3] Analysis of residual stress in cubic boron nitride thin films using micromachined cantilever beams [J].

Cardinale, GF ;

Howitt, DG ;

McCarty, KF ;

Medlin, DL ;

Mirkarimi, PB ;

Moody, NR .

[4] Influence of residual stress on mechanical properties of TiAlN thin films [J].

Cheng, Guo-an ;

Han, Dong-yan ;

Liang, Chang-lin ;

Wu, Xiao-ling ;

Zheng, Rui-ting .

SURFACE & COATINGS TECHNOLOGY, 2013, 228 :S328-S330

[5] Tribological study of boron nitride films [J].

Chong, Y. M. ;

Ye, Q. ;

Yang, Y. ;

Zhang, W. J. ;

Bello, I. ;

Lee, S. T. .

[6] Deposition of cubic boron nitride films on diamond-coated WC:Co inserts [J].

Chong, Y. M. ;

Zhang, W. J. ;

Yang, Y. ;

Ye, Q. ;

Bello, I. ;

Lee, S. T. .

[7] Synthesis and mechanical properties of cubic boron nitride/nanodiamond composite films [J].

Chong, YM ;

Ma, KL ;

Leung, KM ;

Chan, CY ;

Ye, Q ;

Bello, I ;

Zhang, WJ ;

Lee, ST .

CHEMICAL VAPOR DEPOSITION, 2006, 12 (01) :33-38

[8]

DEVRIES RC, 1972, 72CRD178 GEN EL CO

[9] Residual stresses and crystalline quality of heavily boron-doped diamond films analysed by micro-Raman spectroscopy and X-ray diffraction [J].

Ferreira, NG ;

Abramof, E ;

Corat, EJ ;

Trava-Airoldi, VJ .

CARBON, 2003, 41 (06) :1301-1308

[10] FORMATION OF CUBIC BORON-NITRIDE FILMS BY ARC-LIKE PLASMA-ENHANCED ION PLATING METHOD [J].

IKEDA, T ;

KAWATE, Y ;

HIRAI, Y .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1990, 8 (04) :3168-3174

← 1 2 3 4 →