Manufacturability of type-II InAs/GaSb superlattice detectors for infrared imaging

被引:39
作者
Hoglund, L. [1 ]
Asplund, C. [1 ]
von Wurtemberg, R. Marcks [1 ]
Kataria, H. [1 ]
Gamfeldt, A. [1 ]
Smuk, S. [1 ]
Martijn, H. [1 ]
Costard, E. [1 ]
机构
[1] IRnova AB, Isafjordsgatan 22 C5, SE-16440 Kista, Sweden
关键词
Indium antimonides - Gallium compounds - Antimony compounds - Indium arsenide - Thermography (imaging);
D O I
10.1016/j.infrared.2017.03.002
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
Type-Il InAs/GaSb superlattice detectors and focal plane arrays (FPAs) with cut-off wavelength at 5.1 mu.m have been studied. For single pixel devices, dark current densities of 1 x 10(-6) A/cm(2) and quantum efficiencies of 53% were measured at 120 K. From statistics of manufactured FPAs, an average FPA operability of 99.87% was observed. Furthermore, average temporal and spatial noise equivalent temperature difference (NETD) values of 12 mK and 4 mK, respectively, were deduced. Excellent stability of FPAs after non uniformity correction was observed with no deterioration of the ratio between spatial and temporal noise during a two hour long measurement. Also after several cooldowns the ratio between spatial and temporal NETD stayed below 0.6. (C) 2017 Elsevier B.V. All rights reserved.
引用
收藏
页码:28 / 32
页数:5
相关论文
共 10 条
[1]  
Adachi S., PHYS PROPERTIES 3 5
[2]  
Breniere X., 2014, P SPIE 9070 INFR TEC
[3]   Wet etching and chemical polishing of InAs/GaSb superlattice photodiodes [J].
Chaghi, R. ;
Cervera, C. ;
Ait-Kaci, H. ;
Grech, P. ;
Rodriguez, J. B. ;
Christol, P. .
SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2009, 24 (06)
[4]   High image quality type-II superlattice detector for 3.3 μM detection of volatile organic compounds [J].
Malm, Hedda ;
Gamfeldt, Anders ;
von Wurtemberg, Rickard Marcks ;
Lantz, Dan ;
Asplund, Carl ;
Martijn, Henk .
INFRARED PHYSICS & TECHNOLOGY, 2015, 70 :34-39
[5]   QWIPs at IRnova, a status update [J].
Martijn, Henk ;
Gamfeldt, Anders ;
Asplund, Carl ;
Smuk, Sergiy ;
Kataria, Himanshu ;
Costard, Eric .
INFRARED TECHNOLOGY AND APPLICATIONS XLII, 2016, 9819
[6]   High performance MWIR type-II superlattice detectors [J].
Martijn, Henk ;
Asplund, Carl ;
von Wurtemberg, Rickard Marcks ;
Malm, Hedda .
INFRARED TECHNOLOGY AND APPLICATIONS XXXIX, 2013, 8704
[7]  
Nghiem J., 2016, INT C SPAC OPT
[8]   Dark current suppression in type IIInAs/GaSb superlattice long wavelength infrared photodiodes with M-structure barrier [J].
Nguyen, Binh-Minh ;
Hoffman, Darin ;
Delaunay, Pierre-Yves ;
Razeghi, Manijeh .
APPLIED PHYSICS LETTERS, 2007, 91 (16)
[9]  
Olson B. J., 2013, THESIS
[10]   Type-II Superlattice Infrared Detectors [J].
Ting, David Z. -Y. ;
Soibel, Alexander ;
Hoeglund, Linda ;
Nguyen, Jean ;
Hill, Cory J. ;
Khoshakhlagh, Arezou ;
Gunapala, Sarath D. .
ADVANCES IN INFRARED PHOTODETECTORS, 2011, 84 :1-57