Material Design of New p-Type Tin Oxyselenide Semiconductor through Valence Band Engineering and Its Device Application

被引:16
作者
Kim, Taikyu [1 ]
Yoo, Baekeun [1 ]
Youn, Yong [2 ,3 ]
Lee, Miso [2 ,3 ]
Song, Aeran [4 ]
Chung, Kwun-Bum [4 ]
Han, Seungwu [2 ,3 ]
Jeong, Jae Kyeong [1 ]
机构
[1] Hanyang Univ, Dept Elect Engn, Seoul 04763, South Korea
[2] Seoul Natl Univ, Dept Mat Sci & Engn, Seoul 08826, South Korea
[3] Seoul Natl Univ, Res Inst Adv Materals, Seoul 08826, South Korea
[4] Dongguk Univ, Div Phys & Semicond Sci, Seoul 04620, South Korea
关键词
p-type inorganic semiconductor; Sn-Se-O; valence band engineering; high mobility; thermal stability; THIN-FILMS; OXIDE; TRANSISTORS; STORAGE; SURFACE;
D O I
10.1021/acsami.9b12186
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
This paper reports a new p-type tin oxyselenide (SnSeO), which was designed with the concept that the valence band edge from O 2p orbitals in the majority of metal oxides becomes delocalized by hybridizing Se 4p and Sn 5s orbitals. As the Se loading increased, the SnSeO film structures were transformed from tetragonal SnO to orthorhombic SnSe, which was accompanied by an increase in the amorphous phase portion and smooth morphologies. The SnSe0.56O0.44 film annealed at 300 degrees C exhibited the highest Hall mobility (mu(Hall)), 15.0 cm(2) (V s)(-1), and hole carrier density (n(h)), 1.2 X 10(17) cm(-3). The remarkable electrical performance was explained by the low hole effective mass, which was calculated by a first principle calculation. Indeed, the fabricated field-effect transistor (FET) with a p-channel SnSe0.56O0.44 film showed the high field-effect mobility of 5.9 cm(2) (V s)(-1) and an I-ON/OFF ratio of 3 X 10(2). This work demonstrates that anion alloy-based hybridization provides a facile route to the realization of a high-performance p-channel FET and complementary devices.
引用
收藏
页码:40214 / 40221
页数:8
相关论文
共 38 条
  • [1] RETRACTED: Overview of Selector Devices for 3-D Stackable Cross Point RRAM Arrays (Retracted Article)
    Aluguri, Rakesh
    Tseng, Tseung-Yuen
    [J]. IEEE JOURNAL OF THE ELECTRON DEVICES SOCIETY, 2016, 4 (05): : 294 - 306
  • [2] [Anonymous], 2018, 2017 INT ROADMAP DEV
  • [3] Performance Improvement of p-Channel Tin Monoxide Transistors With a Solution-Processed Zirconium Oxide Gate Dielectric
    Azmi, Azida
    Lee, Jiwon
    Gim, Tae Jung
    Choi, Rino
    Jeong, Jae Kyeong
    [J]. IEEE ELECTRON DEVICE LETTERS, 2017, 38 (11) : 1543 - 1546
  • [4] Record Mobility in Transparent p-Type Tin Monoxide Films and Devices by Phase Engineering
    Caraveo-Frescas, Jesus A.
    Nayak, Pradipta K.
    Al-Jawhari, Hala A.
    Granato, Danilo B.
    Schwingenschloegl, Udo
    Alshareeft, Husam N.
    [J]. ACS NANO, 2013, 7 (06) : 5160 - 5167
  • [5] Characterization and properties of NiO films produced by rf magnetron sputtering with oxygen ion source assistance
    Chen, S. C.
    We, C. K.
    Kuo, T. Y.
    Peng, W. C.
    Lin, H. C.
    [J]. THIN SOLID FILMS, 2014, 572 : 51 - 55
  • [6] Thin-film transistors based on p-type Cu2O thin films produced at room temperature
    Fortunato, Elvira
    Figueiredo, Vitor
    Barquinha, Pedro
    Elamurugu, Elangovan
    Barros, Raquel
    Goncalves, Goncalo
    Park, Sang-Hee Ko
    Hwang, Chi-Sun
    Martins, Rodrigo
    [J]. APPLIED PHYSICS LETTERS, 2010, 96 (19)
  • [7] Composition-dependent structural and electrical properties of p-type SnOx thin films prepared by reactive DC magnetron sputtering: effects of oxygen pressure and heat treatment
    Han, Sang Jin
    Kim, Sungmin
    Ahn, Joongyu
    Jeong, Jae Kyeong
    Yang, Hoichang
    Kim, Hyeong Joon
    [J]. RSC ADVANCES, 2016, 6 (75): : 71757 - 71766
  • [8] The Origin of the High Off-State Current in p-Type Cu2O Thin Film Transistors
    Han, Sanggil
    Flewitt, Andrew J.
    [J]. IEEE ELECTRON DEVICE LETTERS, 2017, 38 (10) : 1394 - 1397
  • [9] Off-current reduction in p-type SnO thin film transistors
    Hung, M. P.
    Genoe, J.
    Heremans, P.
    Steudel, S.
    [J]. APPLIED PHYSICS LETTERS, 2018, 112 (26)
  • [10] Thermal oxidation of Ni films for p-type thin-film transistors
    Jiang, Jie
    Wang, Xinghui
    Zhang, Qing
    Li, Jingqi
    Zhang, X. X.
    [J]. PHYSICAL CHEMISTRY CHEMICAL PHYSICS, 2013, 15 (18) : 6875 - 6878