Fabrication of ferroelectric Pb(Zr,Ti)O3 thin films by spray metalorganic chemical vapor deposition

被引：0
作者：
Otani, Yohei
Shibuya, Masaki
Uchiyama, Kiyoshi
Fukuda, Yukio
Shiosaki, Tadashi
机构：
[1] Tokyo Univ Sci, Fac Syst Engn, Dept Elect Syst Engn, Nagano 3910292, Japan
[2] NAIST, Grad Sch Mat Sci, Ikoma, Nara 6300192, Japan
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 2007年 / 46卷 / 25-28期
关键词：
spray-MOCVD; spray; MOCVD; liquid delivery; PZT; thin film;
D O I：
10.1143/JJAP.46.L706
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Ferroelectric Pb(Zr,Ti)O-3 (PZT) thin films were fabricated on Pt-coated Si substrates by spray metalorganic chemical vapor deposition under atmospheric pressure. PZT films deposited at 450 degrees C crystallized into a single-phase perovskite with random orientation by postannealing at 650 degrees C. Pt/PZT/Pt capacitors showed hysteresis and their 2-fold remanent polarization and 2-fold coercive field were 29.8 mu C/cm(2) and 63.0 kV/cm, respectively.
引用
收藏
页码：L706 / L708
页数：3
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