Correlation of the crystal orientation and electrical properties of silicon thin films on glass crystallized by line focus diode laser

被引：2

作者：

Yun, J. ^{[1
]}

Huang, J. ^{[1
]}

Teal, A. ^{[1
]}

Kim, K. ^{[1
,2
]}

Varlamov, S. ^{[1
]}

Green, M. A. ^{[1
]}

机构：

[1] Univ New S Wales, Sch Photovolta & Renewable Energy Engn, Sydney, NSW 2052, Australia

[2] Suntech R&D Australia, Botany, NSW 2019, Australia

来源：

THIN SOLID FILMS | 2016年 / 609卷

关键词：

Crystallization; Silicon; Solar cells; Thin-films; Thin-film deposition; SOLAR-CELLS; POLYCRYSTALLINE SILICON; MULTICRYSTALLINE SILICON; GRAIN-BOUNDARIES; SOLID-PHASE; DENSITY;

D O I：

10.1016/j.tsf.2016.01.048

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

In this work, crystallographic orientation of polycrystalline silicon films on glass formed by continuous wave diode laser crystallization was studied. Most of the grain boundaries were coincidence lattice Sigma 3 twin boundaries and other types of boundaries such as, Sigma 6, Sigma 9, and Sigma 21 were also frequently observed. The highest photoluminescence signal and mobility were observed for a grain with (100) orientation in the normal direction. X-ray diffraction results showed the highest occupancies between 41 and 70% along the (110) orientation. However, the highest occupancies changed to (100) orientation when a 100 nm thick SiOx capping layer was applied. Suns-Voc measurement and photoluminescence showed that higher solar cell performance is obtained from the cell crystallized with the capping layer, which is suspected from increased occupancies of (100) orientation. (C) 2016 Elsevier B.V. All rights reserved.

引用

页码：12 / 18

页数：7

共 27 条

[11]

Irwan Sulaiman S., 2004, 2004 IEEE International Conference on Semiconductor Electronics (IEEE Cat. No.04EX917C), DOI 10.1109/SMELEC.2004.1620853

[12]

Keevers M. J., 2007, 22 EUR PHOT SOL EN C, P235

[13] INFLUENCE OF AS-DEPOSITED FILM STRUCTURE ON (100) TEXTURE IN LASER-RECRYSTALLIZED SILICON ON FUSED QUARTZ [J].

KIMURA, M ;

EGAMI, K .

APPLIED PHYSICS LETTERS, 1984, 44 (04) :420-422

[14] Preferential {100} grain orientation in 10 micrometer-thick laser crystallized multicrystalline silicon on glass [J].

Kuehnapfel, S. ;

Nickel, N. H. ;

Gall, S. ;

Klaus, M. ;

Genzel, C. ;

Rech, B. ;

Amkreutz, D. .

THIN SOLID FILMS, 2015, 576 :68-74

[15]

Kunz O., 2009, THESIS U NEW S WALES

[16] Cw argon laser crystallization of silicon films: Structural properties [J].

Michaud, J. F. ;

Rogel, R. ;

Mohammed-Brahim, T. ;

Sarret, M. .

JOURNAL OF NON-CRYSTALLINE SOLIDS, 2006, 352 (9-20) :998-1002

[17] Development of high-efficiency thin-film Si solar cells using zone-melting recrystallization [J].

Morikawa, H ;

Kawama, Y ;

Matsuno, Y ;

Hamamoto, S ;

Imada, K ;

Ishihara, T ;

Kojima, K ;

Ogama, T .

SOLAR ENERGY MATERIALS AND SOLAR CELLS, 2001, 65 (1-4) :261-268

[18] INFLUENCE OF DISLOCATION DENSITY ON RECOMBINATION AT GRAIN-BOUNDARIES IN MULTICRYSTALLINE SILICON [J].

SEIFERT, W ;

MORGENSTERN, G ;

KITTLER, M .

SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 1993, 8 (09) :1687-1691

[19]

Teal A, 2014, SOL ENERG MAT SOL C, V130, P1, DOI 10.1016/j.solmat.2014.06.024

[20] Measurements of potential barrier height of grain boundaries in polycrystalline silicon by Kelvin probe force microscopy [J].

Tsurekawa, S ;

Kido, K ;

Watanabe, T .

PHILOSOPHICAL MAGAZINE LETTERS, 2005, 85 (01) :41-49

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