Fiber-optic Fabry-Perot interferometer based high sensitive cantilever microphone

被引：49

作者：

Chen, Ke ^{[1
]}

Gong, Zhenfeng ^{[1
]}

Guo, Min ^{[1
]}

Yu, Shaochen ^{[1
]}

Qu, Chao ^{[1
]}

Zhou, Xinlei ^{[1
]}

Yu, Qingxu ^{[1
]}

机构：

[1] Dalian Univ Technol, Sch Optoelect Engn & Instrumentat Sci, Dalian 116029, Liaoning, Peoples R China

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2018年 / 279卷

关键词：

Cantilever microphone; Fabry-Perot interferometer; Fiber-optic sensor; Laser micro-machining; ENHANCED PHOTOACOUSTIC-SPECTROSCOPY; MULTILAYER GRAPHENE DIAPHRAGM; PRESSURE SENSOR; ACOUSTIC SENSOR;

D O I：

10.1016/j.sna.2018.06.010

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We demonstrate a high sensitive cantilever microphone based on fiber-optic Fabry-Perot interferometer. A stainless steel cantilever is manufactured by laser micro-machining technique. The size of the cantilever is 2 mm x 1 mm, and the thickness is 10 mu m. The air gap between the fiber endface and the cantilever forms the Fabry-Perot cavity. Acoustic sensing test demonstrates high sensitivities in the frequency range from 100 Hz to 3 kHz. The pressure sensitivity and the noise-limited minimum detectable acoustic pressure level are measured to be 364 nm/Pa and 8.5 mu Pa/Hz(1/2) at the frequency of 1 kHz, respectively. The Fabry-Perot interferometer based cantilever microphone shows advantages of high sensitivity, small size, easy to install and immune to electromagnetic interference. (C) 2018 Elsevier B.V. All rights reserved.

引用

页码：107 / 112

页数：6

共 23 条

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