Preparation of n-type conductive transparent thin films of AgInO2:Sn with delafossite-type structure by pulsed laser deposition

被引:22
作者
Ibuki, S [1 ]
Yanagi, H [1 ]
Ueda, K [1 ]
Kawazoe, H [1 ]
Hosono, H [1 ]
机构
[1] Tokyo Inst Technol, Mat & Struct Lab, Midori Ku, Yokohama, Kanagawa 2268503, Japan
关键词
D O I
10.1063/1.1287404
中图分类号
O59 [应用物理学];
学科分类号
摘要
Sn-doped AgInO2 thin films were prepared on alpha-Al2O3(0001) single-crystal substrates by pulsed laser deposition. The films prepared under optimized conditions have high optical transmittance up to the near-ultraviolet region and high electrical conductivity. The optical band gap was estimated to be similar to 4.1 eV, and electrical conductivity was 7.3x10(1) S cm(-1) at 300 K. The carrier concentration and Hall mobility at 300 K were 3.3x10(20) cm(-3) and 1.4 cm(2) V(-1)s(-1), respectively. (C) 2000 American Institute of Physics. [S0021-8979(00)04217-1].
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收藏
页码:3067 / 3069
页数:3
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