A 2-D MEMS Scanning Mirror Using Piezoelectric PZT Beam Actuators

被引：16

作者：

Koh, Kah How ^{[1
]}

Kobayashi, Takeshi ^{[2
]}

Hsiao, Fu-Li ^{[1
,3
]}

Lee, Chengkuo ^{[1
]}

机构：

[1] Natl Univ Singapore, Dept Elect & Comp Engn, Singapore 117576, Singapore

[2] Natl Inst Adv Ind Sci & Technol, Tsukuba, Ibaraki, Japan

[3] Natl Changhua Univ Educ, Grad Inst Photon, Changhua 500, Taiwan

来源：

PROCEEDINGS OF THE EUROSENSORS XXIII CONFERENCE | 2009年 / 1卷 / 01期

关键词：

Microelectromechanical Systems (MEMS); Optical MEMS; Scanning mirror; Piezoelectric actuator; PZT;

D O I：

10.1016/j.proche.2009.07.325

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

A silicon micromirror driven by a piezoelectric Pb(Zr,Ti)O-3 beam actuator has been demonstrated for two-dimensional scanning mirror applications. The mirror is micromachined from the device layer of an SOI wafer, while the piezoelectric beam actuator contains multilayers of Pt/Ti/PZT/Pt/Ti/SiO2/Si which is deposited and released from a SOI wafer. A 1x10 PZT arrayed actuator are separately arranged in parallel on a Si beam. Bending mode is measured at 34Hz as while the torsional mode is measured at 197Hz. We demonstrated 2-D raster scanning patterns by applying AC bias of 34Hz on half of the 10 actuators and 197Hz on the other half actuators.

引用

页码：1303 / +

页数：2

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