CVD diamond growth from nanodiamond seeds buried under a thin chromium layer

被引：11
|
作者：
Degutis, G. [1 ]
Pobedinskas, P. [1 ,2 ]
Turner, S. [3 ]
Lu, Y. -G. [3 ,4 ,5 ]
Al Riyami, S. [1 ,4 ,5 ,6 ]
Ruttens, B. [2 ]
Yoshitake, T. [4 ,5 ]
D'Haen, J. [2 ]
Haenen, K. [1 ,2 ]
Verbeeck, J. [3 ]
Hardy, A. [1 ,2 ]
Van Bael, M. K. [1 ,2 ]
机构：
[1] Hasselt Univ, Inst Mat Res IMO, B-3500 Hasselt, Belgium
[2] IMEC VZW, IMOMEC, B-3590 Diepenbeek, Belgium
[3] Univ Antwerp, EMAT, B-2020 Antwerp, Belgium
[4] Univ N Carolina, Dept Mech Engn & Engn Sci, Charlotte, NC 28223 USA
[5] Kyushu Univ, 6-1 Kasuga, Fukuoka 8168580, Japan
[6] German Univ Technol Oman, Barka, Oman
来源：
DIAMOND AND RELATED MATERIALS | 2016年 / 64卷
关键词：
CVD diamond; Cr diffusion; Cr carburization; Si-Cr interface; MECHANICAL-PROPERTIES; NUCLEATION; DEPOSITION; SUBSTRATE; MICROWAVE; SILICIDE; KINETICS; FILMS;
D O I：
10.1016/j.diamond.2016.02.013
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
This work presents a morphological and structural analysis of CVD diamond growth on silicon from nanodiamond seeds covered by a 50 nm thick chromium layer. The role of carbon diffusion as well as chromium and carbon silicide formation is analyzed. The local diamond environment is investigated by scanning transmission electron microscopy in combination with electron energy-loss spectroscopy. The evolution of the diamond phase composition (sp(3)/sp(2)) is evaluated by micro-Raman spectroscopy. Raman and X-ray diffraction analysis are used to identify the interfacial phases formed during CVD growth. Based upon the observed morphological and structural evolution, a diamond growth model from nanodiamond seeds buried beneath a thin Cr layer is proposed. (C) 2016 Elsevier B.V. All rights reserved.
引用
收藏
页码：163 / 168
页数：6
相关论文
共 50 条
  • [1] Etching Kinetics of Nanodiamond Seeds in the Early Stages of CVD Diamond Growth
    Salerno, Raffaella
    Pede, Biagio
    Mastellone, Matteo
    Serpente, Valerio
    Valentini, Veronica
    Bellucci, Alessandro
    Trucchi, Daniele M.
    Domenici, Fabio
    Tomellini, Massimo
    Polini, Riccardo
    ACS OMEGA, 2023, 8 (28): : 25496 - 25505
  • [2] Effect of plasma modulation on the nucleation and crystal evolution of nanodiamond seeds during CVD diamond growth
    Zheng, Senjie
    Wang, Qiang
    Guo, Kesheng
    Bai, Jie
    Yang, Zhenhuai
    Yu, Hailing
    Liu, Hong
    Wei, Hong
    Zhu, Jingming
    Hu, Qiang
    JOURNAL OF CRYSTAL GROWTH, 2024, 627
  • [3] Nanodiamond seeding for nucleation and growth of CVD diamond films
    Ralchenko, V
    Saveliev, A
    Voronina, S
    Dementjev, A
    Maslakov, K
    Salerno, M
    Podesta, A
    Milani, P
    SYNTHESIS, PROPERTIES AND APPLICATIONS OF ULTRANANOCRYSTALLINE DIAMOND, 2005, 192 : 109 - 124
  • [4] Thin film growth conditions for CVD diamond under low pressure
    Wang, JT
    Liu, ZJ
    Zhang, DW
    Zhang, JY
    Wan, YZ
    1998 5TH INTERNATIONAL CONFERENCE ON SOLID-STATE AND INTEGRATED CIRCUIT TECHNOLOGY PROCEEDINGS, 1998, : 819 - 822
  • [5] Thin film growth conditions for CVD diamond under low pressure
    Fudan Univ, Shanghai, China
    Int Conf Solid State Integr Circuit Technol Proc, (819-822):
  • [6] INTERFACIAL LAYER EFFECTS IN THE GROWTH OF CVD DIAMOND
    POLO, MC
    CIFRE, J
    ESTEVE, J
    DIAMOND AND RELATED MATERIALS, 1994, 3 (4-6) : 492 - 494
  • [7] Improvement of nucleation and growth of CVD diamond films by using explosive detonation nanodiamond
    Shao, LX
    Liu, XP
    Xu, SW
    Xu, K
    Chen, GH
    FOURTH INTERNATIONAL CONFERENCE ON THIN FILM PHYSICS AND APPLICATIONS, 2000, 4086 : 831 - 834
  • [8] Nanodiamond injection into the gas-phase during CVD diamond film growth
    Feoktistov, NA
    Golubev, VG
    Grudinkin, SA
    Nashchekin, AV
    Perova, TS
    Vul', AY
    Synthesis, Properties and Applications of Ultrananocrystalline Diamond, 2005, 192 : 145 - 156
  • [9] Buried Boron Doped Layer for CVD Diamond Photo-Thermionic Cathodes
    Bellucci, A.
    Girolami, M.
    Calvani, P.
    Michaelson, S.
    Hofmann, A.
    Carcelen, V.
    Trucchi, D. M.
    IEEE TRANSACTIONS ON NANOTECHNOLOGY, 2016, 15 (06) : 862 - 866
  • [10] EFFECT OF CATALYST LAYER THICKNESS ON GROWTH OF CVD DIAMOND
    Shahsavari, Fatemeh
    Ghoranneviss, Mahmood
    Khalaj, Zahra
    Diudea, Mircea V.
    STUDIA UNIVERSITATIS BABES-BOLYAI CHEMIA, 2011, 56 (02): : 141 - 148
12345