Hybrid layered polymer slot waveguide Young interferometer

被引：18

作者：

Ahmadi, Leila ^{[1
]}

Hiltunen, Marianne ^{[2
]}

Stenberg, Petri ^{[1
]}

Hiltunen, Jussi ^{[2
]}

Aikio, Sanna ^{[2
]}

Roussey, Matthieu ^{[1
]}

Saarinen, Jyrki ^{[1
]}

Honkanen, Seppo ^{[1
]}

机构：

[1] Univ Eastern Finland, Inst Photon, POB 111, FI-80101 Joensuu, Finland

[2] VTT Tech Res Ctr Finland, Kaitovayla 1, FI-90570 Oulu, Finland

来源：

OPTICS EXPRESS | 2016年 / 24卷 / 10期

基金：

芬兰科学院;

关键词：

NANOIMPRINT-LITHOGRAPHY; DEPOSITION; COUPLERS; LIGHT;

D O I：

10.1364/OE.24.010275

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We demonstrate a polymer slot waveguide Young interferometer coated with a bilayer of Al2O3/TiO2. The approach enables relaxed dimensions of the polymer waveguide which simplifies the fabrication of the structure with a resolution of 50 nm. The layers were coated by an atomic layer deposition technique. The feasibility of the device was investigated by exploiting the interferometric structure as a bulk refractive index sensor operating at 975 nm wavelength for detection of an ethanol-water solution. A refractive index change of 1 x 10(-6) RIU with a sensing length of only 800 mu m was detected. The approach confirms the possibility of realizing a low cost device with a small footprint and enhanced sensitivity by employing the TiO2 rails in the sides of the slot waveguide. (C) 2016 Optical Society of America

引用

页码：10275 / 10285

页数：11

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