β-Ga2O3 thin films on sapphire pre-seeded by homo-self-templated buffer layer for solar-blind UV photodetector

被引:128
作者
Liu, X. Z. [1 ]
Guo, P. [1 ]
Sheng, T. [1 ]
Qian, L. X. [1 ]
Zhang, W. L. [1 ]
Li, Y. R. [1 ]
机构
[1] Univ Elect Sci & Technol China, Sch Microelect & Solid State Elect, State Key Lab Elect Thin Films & Integrated Devic, Chengdu 610054, Peoples R China
关键词
Gallium oxide; Ultraviolet photodetector; Molecular beam epitaxy; Thin films; MOLECULAR-BEAM EPITAXY; ULTRAVIOLET PHOTODETECTORS; C-PLANE; NANOSTRUCTURES; GROWTH; GAN;
D O I
10.1016/j.optmat.2015.11.023
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Gallium oxide thin films were grown on c-plane sapphire substrate by molecular beam epitaxy. The homo-self-templated buffer layer was introduced for the gallium oxide thin film growth, and accordingly the FWHM of the on-axis ((2) over bar 01) beta-Ga2O3 diffraction peak of the X-ray diffraction rocking curve was reduced from 1.9 degrees to 0.9 degrees, proving an improvement in the crystalline quality of beta-Ga2O3 thin film. In addition, the planar-geometry metal-semiconductor-metal photoconductive detectors (PDs) were manufactured by using the 100 nm beta-Ga2O3 thin films. Accordingly, the PDs based on the beta-Ga2O3 thin films with homo-self-templated buffer layer performed obviously improved device properties, such as small dark current of 0.04 nA, high photo- to dark- current ratio in the order of 10(4), large photoresponsivity of 259 A/W, high external quantum efficiency of 7.9 x 10(4)%, weak persistent photoconductivity, and excellent solar-blind UV responsivity. Hence, it is reasonable to believe that the beta-Ga2O3 thin film grown with homo-self-templated buffer layer is a promising candidate for the application in solar-blind UV camera. (C) 2015 Elsevier B.V. All rights reserved.
引用
收藏
页码:203 / 207
页数:5
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