3-D stacked thin-film photodetectors for multispectral detection applications

被引：14

作者：

Seo, SW ^{[1
]}

Geddis, DL

Jokerst, NM

机构：

[1] Georgia Inst Technol, Ctr Microelect Res, Atlanta, GA 30332 USA

[2] Georgia Inst Technol, Sch Elect & Comp Engn, Atlanta, GA 30332 USA

来源：

IEEE PHOTONICS TECHNOLOGY LETTERS | 2003年 / 15卷 / 04期

关键词：

coarse wavelength-division multiplexing (CWDM); heterogeneous integration; integrated optoelectronics; multispectral detection; thin-film photodetectors;

D O I：

10.1109/LPT.2003.809273

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

To demonstrate simultaneous multispectral detection, short and long wavelength thin-film detectors, which are grown and optimized separately, are colocated and heterogeneously integrated in a three-dimensional (3-D) stack onto pads on an Si substrate. Simultaneous two-color detection by each detector in the 3-D stack has been measured and theoretically explored. This heterogeneous integration of two different detectors in a 3-D stack is an interesting physical integration technology for multispectral imaging systems and coarse wavelength-division-multiplexing systems.

引用

页码：578 / 580

页数：3

共 12 条

[1] Adachi S., 1992, PHYS PROPERTIES 3 5, P135
[2] BORN M, 1980, PRINCIPLES OPTICS, P57
[3] BROZEL MR, 1996, EMIS DATAREVIEWS 16, P207
[4] Hybrid coherence multiplexing/coarse wavelength-division multiplexing passive optical network for customer access
Cahill, MJL
Pendock, GJ
Sampson, DD
[J]. IEEE PHOTONICS TECHNOLOGY LETTERS, 1997, 9 (07) : 1032 - 1034
[5] ALIGNABLE EPITAXIAL LIFTOFF OF GAAS MATERIALS WITH SELECTIVE DEPOSITION USING POLYIMIDE DIAPHRAGMS
CAMPERIGINESTET, C
HARGIS, M
JOKERST, N
ALLEN, M
[J]. IEEE PHOTONICS TECHNOLOGY LETTERS, 1991, 3 (12) : 1123 - 1126
[6] HOFF L, 1992, SPIE SIGNAL DATA PRO, V1698, P100
[7] KOCK A, 1992, APPL PHYS LETT, V60, P2011, DOI 10.1063/1.107127
[8] Optical WDM transceiver module using wavelength-selective coupler and WDM-PD for optical access networks
Kuhara, Y
Fujimura, Y
Nakanishi, H
Iguchi, Y
Terauchi, H
Yamabayashi, N
Ishiguro, Y
Kanamori, H
[J]. JOURNAL OF LIGHTWAVE TECHNOLOGY, 1997, 15 (04) : 704 - 710
[9] LANGHOFF CA, 1993, P SOC PHOTO-OPT INS, V1849, P336, DOI 10.1117/12.147110
[10] MULTISPECTRAL INTERFERENCE FILTERS AND THEIR APPLICATION TO THE DESIGN OF COMPACT NONDISPERSIVE INFRARED GAS ANALYZERS FOR POLLUTION-CONTROL
LOPEZ, F
DEFRUTOS, J
[J]. SENSORS AND ACTUATORS A-PHYSICAL, 1993, 37-8 : 502 - 506

← 1 2 →