Magnetic properties and thermal stability of Co/HfN multilayer films for high-frequency application

被引:3
作者
Cao, Y. [1 ]
Zhang, Y. W. [1 ]
Ohnuma, S. [1 ,2 ]
Kobayashi, N. [2 ]
Masumoto, H. [1 ]
机构
[1] Tohoku Univ, Frontier Res Inst Interdisciplinary Sci, Sendai, Miyagi 9808578, Japan
[2] Res Inst Electromagnet Mat, Sendai, Miyagi 9820807, Japan
关键词
THIN-FILMS; GRANULAR FILMS; SOFT;
D O I
10.1063/1.4983402
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Sputtered metal-nonmetal granular films tend to exhibit growth-induced perpendicular magnetic anisotropy. In this work, Co/HfN multilayers were synthesized to suppress the development of columnar clusters along the deposition direction. The results reveal that a HfN interlayer thickness of less than 0.4 nm is insufficient to separate the columnar clusters; however, increasing the interlayer thickness to 0.8 nm with increasing the sputtering duration successfully led to typical in-plane magnetic anisotropy with a coercivity as low as 3 Oe. The Co(4 nm)/HfN(1.5 nm) multilayers exhibited high permeability of approximately 260 up to 1.6 GHz. The resonance frequency increased from 1.8 to 2.3 GHz with increasing annealing temperature, which is attributed to the increased magnetic anisotropy. Our results suggest that the multilayers still show high-frequency performance even after annealing at 450 degrees C, which would be a big advantage for complementary metal-oxide-semiconductor (CMOS) fabrication technology. (C) 2017 Author(s).
引用
收藏
页数:7
相关论文
共 23 条
[1]   Magnetically soft, high-moment, high-resistivity thin films using discontinuous metal/native oxide multilayers [J].
Beach, GSD ;
Berkowitz, AE ;
Parker, FT ;
Smith, DJ .
APPLIED PHYSICS LETTERS, 2001, 79 (02) :224-226
[2]   Enhancement of low-field magneto-dielectric response in two-dimensional Co/AlF granular films [J].
Cao, Y. ;
Kobayashi, N. ;
Zhang, Y. W. ;
Ohnuma, S. ;
Masumoto, H. .
APPLIED PHYSICS LETTERS, 2017, 110 (07)
[3]   Control of the static and high-frequency magnetic properties of perpendicular anisotropic Co-HfN granular films through insertion of HfN interlayers [J].
Cao, Yang ;
Zhang, Yiwen ;
Ohnuma, Shigehiro ;
Kobayashi, Nobukiyo ;
Masumoto, Hiroshi .
JAPANESE JOURNAL OF APPLIED PHYSICS, 2017, 56 (04)
[4]   Structure and Isotropic High-Frequency Response of Co-HfN Nanogranular Films [J].
Cao, Yang ;
Zhang, Yiwen ;
Ohnuma, Shigehiro ;
Kobayashi, Nobukiyo ;
Masumoto, Hiroshi .
IEEE TRANSACTIONS ON MAGNETICS, 2015, 51 (11)
[5]   Magnetic properties of FeSiB thin films displaying stripe domains [J].
Coisson, Marco ;
Vinai, Franco ;
Tiberto, Paola ;
Celegato, Federica .
JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS, 2009, 321 (07) :806-809
[6]   Effect of oxide shells on the magnetic and magnetotransport characteristics of oxidized FeCoZr nanogranules in Al2O3 [J].
Fedotova, J. ;
Kasiuk, J. ;
Przewoznik, J. ;
Kapusta, Cz ;
Svito, I. ;
Kalinin, Yu ;
Sitnikov, A. .
JOURNAL OF ALLOYS AND COMPOUNDS, 2011, 509 (41) :9869-9875
[7]   Microstructure and magnetism of FeCo-SiO2 nano-granular films for high frequency application [J].
Ge, Shihui ;
Yao, Dongsheng ;
Yamaguchi, Masahiro ;
Yang, Xiaolin ;
Zuo, Huaping ;
Ishii, Takeshi ;
Zhou, Dong ;
Li, Fashen .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2007, 40 (12) :3660-3664
[8]   [Fe80Ni20-O/SiO2]n Multilayer thin films for applications in GHz range [J].
Geng, H. ;
Wei, J. Q. ;
Nie, S. J. ;
Wang, Y. ;
Wang, Z. W. ;
Wang, L. S. ;
Chen, Y. ;
Peng, D. L. ;
Li, F. S. ;
Xue, D. S. .
MATERIALS LETTERS, 2013, 92 :346-349
[9]   Nanostructured magnetic Fe-Ni-Co/Teflon multilayers for high-frequency applications in the gigahertz range [J].
Greve, Henry ;
Pochstein, Christian ;
Takele, Haile ;
Zaporojtchenko, Vladimir ;
Faupel, Franz ;
Gerber, Andreas ;
Frommberger, Michael ;
Quandt, Eckhard .
APPLIED PHYSICS LETTERS, 2006, 89 (24)
[10]   GRAIN-STRUCTURE AND MAGNETISM OF NANOCRYSTALLINE FERROMAGNETS [J].
HERZER, G .
IEEE TRANSACTIONS ON MAGNETICS, 1989, 25 (05) :3327-3329