共 23 条
Magnetic properties and thermal stability of Co/HfN multilayer films for high-frequency application
被引:3
作者:

Cao, Y.
论文数: 0 引用数: 0
h-index: 0
机构:
Tohoku Univ, Frontier Res Inst Interdisciplinary Sci, Sendai, Miyagi 9808578, Japan Tohoku Univ, Frontier Res Inst Interdisciplinary Sci, Sendai, Miyagi 9808578, Japan

Zhang, Y. W.
论文数: 0 引用数: 0
h-index: 0
机构:
Tohoku Univ, Frontier Res Inst Interdisciplinary Sci, Sendai, Miyagi 9808578, Japan Tohoku Univ, Frontier Res Inst Interdisciplinary Sci, Sendai, Miyagi 9808578, Japan

Ohnuma, S.
论文数: 0 引用数: 0
h-index: 0
机构:
Tohoku Univ, Frontier Res Inst Interdisciplinary Sci, Sendai, Miyagi 9808578, Japan
Res Inst Electromagnet Mat, Sendai, Miyagi 9820807, Japan Tohoku Univ, Frontier Res Inst Interdisciplinary Sci, Sendai, Miyagi 9808578, Japan

Kobayashi, N.
论文数: 0 引用数: 0
h-index: 0
机构:
Res Inst Electromagnet Mat, Sendai, Miyagi 9820807, Japan Tohoku Univ, Frontier Res Inst Interdisciplinary Sci, Sendai, Miyagi 9808578, Japan

Masumoto, H.
论文数: 0 引用数: 0
h-index: 0
机构:
Tohoku Univ, Frontier Res Inst Interdisciplinary Sci, Sendai, Miyagi 9808578, Japan Tohoku Univ, Frontier Res Inst Interdisciplinary Sci, Sendai, Miyagi 9808578, Japan
机构:
[1] Tohoku Univ, Frontier Res Inst Interdisciplinary Sci, Sendai, Miyagi 9808578, Japan
[2] Res Inst Electromagnet Mat, Sendai, Miyagi 9820807, Japan
来源:
关键词:
THIN-FILMS;
GRANULAR FILMS;
SOFT;
D O I:
10.1063/1.4983402
中图分类号:
TB3 [工程材料学];
学科分类号:
0805 ;
080502 ;
摘要:
Sputtered metal-nonmetal granular films tend to exhibit growth-induced perpendicular magnetic anisotropy. In this work, Co/HfN multilayers were synthesized to suppress the development of columnar clusters along the deposition direction. The results reveal that a HfN interlayer thickness of less than 0.4 nm is insufficient to separate the columnar clusters; however, increasing the interlayer thickness to 0.8 nm with increasing the sputtering duration successfully led to typical in-plane magnetic anisotropy with a coercivity as low as 3 Oe. The Co(4 nm)/HfN(1.5 nm) multilayers exhibited high permeability of approximately 260 up to 1.6 GHz. The resonance frequency increased from 1.8 to 2.3 GHz with increasing annealing temperature, which is attributed to the increased magnetic anisotropy. Our results suggest that the multilayers still show high-frequency performance even after annealing at 450 degrees C, which would be a big advantage for complementary metal-oxide-semiconductor (CMOS) fabrication technology. (C) 2017 Author(s).
引用
收藏
页数:7
相关论文
共 23 条
[1]
Magnetically soft, high-moment, high-resistivity thin films using discontinuous metal/native oxide multilayers
[J].
Beach, GSD
;
Berkowitz, AE
;
Parker, FT
;
Smith, DJ
.
APPLIED PHYSICS LETTERS,
2001, 79 (02)
:224-226

Beach, GSD
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Calif San Diego, Dept Phys, La Jolla, CA 92093 USA Univ Calif San Diego, Dept Phys, La Jolla, CA 92093 USA

Berkowitz, AE
论文数: 0 引用数: 0
h-index: 0
机构: Univ Calif San Diego, Dept Phys, La Jolla, CA 92093 USA

Parker, FT
论文数: 0 引用数: 0
h-index: 0
机构: Univ Calif San Diego, Dept Phys, La Jolla, CA 92093 USA

Smith, DJ
论文数: 0 引用数: 0
h-index: 0
机构: Univ Calif San Diego, Dept Phys, La Jolla, CA 92093 USA
[2]
Enhancement of low-field magneto-dielectric response in two-dimensional Co/AlF granular films
[J].
Cao, Y.
;
Kobayashi, N.
;
Zhang, Y. W.
;
Ohnuma, S.
;
Masumoto, H.
.
APPLIED PHYSICS LETTERS,
2017, 110 (07)

Cao, Y.
论文数: 0 引用数: 0
h-index: 0
机构:
Tohoku Univ, Frontier Res Inst Interdisciplinary Sci, Aoba Ku, 6-3 Aramaki Aza Aoba, Sendai, Miyagi 9808578, Japan Tohoku Univ, Frontier Res Inst Interdisciplinary Sci, Aoba Ku, 6-3 Aramaki Aza Aoba, Sendai, Miyagi 9808578, Japan

Kobayashi, N.
论文数: 0 引用数: 0
h-index: 0
机构:
Res Inst Electromagnet Mat, Taihaku Ku, 2-1-1 Yagiyama Minami, Sendai, Miyagi 9820807, Japan Tohoku Univ, Frontier Res Inst Interdisciplinary Sci, Aoba Ku, 6-3 Aramaki Aza Aoba, Sendai, Miyagi 9808578, Japan

Zhang, Y. W.
论文数: 0 引用数: 0
h-index: 0
机构:
Tohoku Univ, Frontier Res Inst Interdisciplinary Sci, Aoba Ku, 6-3 Aramaki Aza Aoba, Sendai, Miyagi 9808578, Japan Tohoku Univ, Frontier Res Inst Interdisciplinary Sci, Aoba Ku, 6-3 Aramaki Aza Aoba, Sendai, Miyagi 9808578, Japan

Ohnuma, S.
论文数: 0 引用数: 0
h-index: 0
机构:
Tohoku Univ, Frontier Res Inst Interdisciplinary Sci, Aoba Ku, 6-3 Aramaki Aza Aoba, Sendai, Miyagi 9808578, Japan
Res Inst Electromagnet Mat, Taihaku Ku, 2-1-1 Yagiyama Minami, Sendai, Miyagi 9820807, Japan Tohoku Univ, Frontier Res Inst Interdisciplinary Sci, Aoba Ku, 6-3 Aramaki Aza Aoba, Sendai, Miyagi 9808578, Japan

Masumoto, H.
论文数: 0 引用数: 0
h-index: 0
机构:
Tohoku Univ, Frontier Res Inst Interdisciplinary Sci, Aoba Ku, 6-3 Aramaki Aza Aoba, Sendai, Miyagi 9808578, Japan Tohoku Univ, Frontier Res Inst Interdisciplinary Sci, Aoba Ku, 6-3 Aramaki Aza Aoba, Sendai, Miyagi 9808578, Japan
[3]
Control of the static and high-frequency magnetic properties of perpendicular anisotropic Co-HfN granular films through insertion of HfN interlayers
[J].
Cao, Yang
;
Zhang, Yiwen
;
Ohnuma, Shigehiro
;
Kobayashi, Nobukiyo
;
Masumoto, Hiroshi
.
JAPANESE JOURNAL OF APPLIED PHYSICS,
2017, 56 (04)

Cao, Yang
论文数: 0 引用数: 0
h-index: 0
机构:
Tohoku Univ, Frontier Res Inst Interdisciplinary Sci, Sendai, Miyagi 9808578, Japan Tohoku Univ, Frontier Res Inst Interdisciplinary Sci, Sendai, Miyagi 9808578, Japan

Zhang, Yiwen
论文数: 0 引用数: 0
h-index: 0
机构:
Tohoku Univ, Frontier Res Inst Interdisciplinary Sci, Sendai, Miyagi 9808578, Japan Tohoku Univ, Frontier Res Inst Interdisciplinary Sci, Sendai, Miyagi 9808578, Japan

Ohnuma, Shigehiro
论文数: 0 引用数: 0
h-index: 0
机构:
Tohoku Univ, Frontier Res Inst Interdisciplinary Sci, Sendai, Miyagi 9808578, Japan
Res Inst Electromagnet Mat, Sendai, Miyagi 9820807, Japan Tohoku Univ, Frontier Res Inst Interdisciplinary Sci, Sendai, Miyagi 9808578, Japan

Kobayashi, Nobukiyo
论文数: 0 引用数: 0
h-index: 0
机构:
Res Inst Electromagnet Mat, Sendai, Miyagi 9820807, Japan Tohoku Univ, Frontier Res Inst Interdisciplinary Sci, Sendai, Miyagi 9808578, Japan

Masumoto, Hiroshi
论文数: 0 引用数: 0
h-index: 0
机构:
Tohoku Univ, Frontier Res Inst Interdisciplinary Sci, Sendai, Miyagi 9808578, Japan Tohoku Univ, Frontier Res Inst Interdisciplinary Sci, Sendai, Miyagi 9808578, Japan
[4]
Structure and Isotropic High-Frequency Response of Co-HfN Nanogranular Films
[J].
Cao, Yang
;
Zhang, Yiwen
;
Ohnuma, Shigehiro
;
Kobayashi, Nobukiyo
;
Masumoto, Hiroshi
.
IEEE TRANSACTIONS ON MAGNETICS,
2015, 51 (11)

Cao, Yang
论文数: 0 引用数: 0
h-index: 0
机构:
Tohoku Univ, Frontier Res Inst Interdisciplinary Sci, Sendai, Miyagi 9808578, Japan Tohoku Univ, Frontier Res Inst Interdisciplinary Sci, Sendai, Miyagi 9808578, Japan

Zhang, Yiwen
论文数: 0 引用数: 0
h-index: 0
机构:
Tohoku Univ, Frontier Res Inst Interdisciplinary Sci, Sendai, Miyagi 9808578, Japan Tohoku Univ, Frontier Res Inst Interdisciplinary Sci, Sendai, Miyagi 9808578, Japan

Ohnuma, Shigehiro
论文数: 0 引用数: 0
h-index: 0
机构:
Tohoku Univ, Frontier Res Inst Interdisciplinary Sci, Sendai, Miyagi 9808578, Japan
DENJIKEN, Res Inst Electromagnet Mat, Sendai, Miyagi 9820827, Japan Tohoku Univ, Frontier Res Inst Interdisciplinary Sci, Sendai, Miyagi 9808578, Japan

Kobayashi, Nobukiyo
论文数: 0 引用数: 0
h-index: 0
机构:
DENJIKEN, Res Inst Electromagnet Mat, Sendai, Miyagi 9820827, Japan Tohoku Univ, Frontier Res Inst Interdisciplinary Sci, Sendai, Miyagi 9808578, Japan

Masumoto, Hiroshi
论文数: 0 引用数: 0
h-index: 0
机构:
Tohoku Univ, Frontier Res Inst Interdisciplinary Sci, Sendai, Miyagi 9808578, Japan Tohoku Univ, Frontier Res Inst Interdisciplinary Sci, Sendai, Miyagi 9808578, Japan
[5]
Magnetic properties of FeSiB thin films displaying stripe domains
[J].
Coisson, Marco
;
Vinai, Franco
;
Tiberto, Paola
;
Celegato, Federica
.
JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS,
2009, 321 (07)
:806-809

Coisson, Marco
论文数: 0 引用数: 0
h-index: 0
机构:
INRIM, Electromagnetism Div, I-10135 Turin, TO, Italy INRIM, Electromagnetism Div, I-10135 Turin, TO, Italy

Vinai, Franco
论文数: 0 引用数: 0
h-index: 0
机构:
INRIM, Electromagnetism Div, I-10135 Turin, TO, Italy INRIM, Electromagnetism Div, I-10135 Turin, TO, Italy

Tiberto, Paola
论文数: 0 引用数: 0
h-index: 0
机构:
INRIM, Electromagnetism Div, I-10135 Turin, TO, Italy INRIM, Electromagnetism Div, I-10135 Turin, TO, Italy

Celegato, Federica
论文数: 0 引用数: 0
h-index: 0
机构:
INRIM, Electromagnetism Div, I-10135 Turin, TO, Italy INRIM, Electromagnetism Div, I-10135 Turin, TO, Italy
[6]
Effect of oxide shells on the magnetic and magnetotransport characteristics of oxidized FeCoZr nanogranules in Al2O3
[J].
Fedotova, J.
;
Kasiuk, J.
;
Przewoznik, J.
;
Kapusta, Cz
;
Svito, I.
;
Kalinin, Yu
;
Sitnikov, A.
.
JOURNAL OF ALLOYS AND COMPOUNDS,
2011, 509 (41)
:9869-9875

Fedotova, J.
论文数: 0 引用数: 0
h-index: 0
机构:
NC PHEP BSU, Minsk 220040, BELARUS NC PHEP BSU, Minsk 220040, BELARUS

Kasiuk, J.
论文数: 0 引用数: 0
h-index: 0
机构:
NC PHEP BSU, Minsk 220040, BELARUS NC PHEP BSU, Minsk 220040, BELARUS

论文数: 引用数:
h-index:
机构:

Kapusta, Cz
论文数: 0 引用数: 0
h-index: 0
机构:
AGH Univ Sci & Technol, Fac Phys & Appl Comp Sci, Dept Solid State Phys, PL-30059 Krakow, Poland NC PHEP BSU, Minsk 220040, BELARUS

Svito, I.
论文数: 0 引用数: 0
h-index: 0
机构:
Belarusian State Univ, Minsk 220030, BELARUS NC PHEP BSU, Minsk 220040, BELARUS

Kalinin, Yu
论文数: 0 引用数: 0
h-index: 0
机构:
Voronez State Tech Univ, Voronezh 394026, Russia NC PHEP BSU, Minsk 220040, BELARUS

Sitnikov, A.
论文数: 0 引用数: 0
h-index: 0
机构:
Voronez State Tech Univ, Voronezh 394026, Russia NC PHEP BSU, Minsk 220040, BELARUS
[7]
Microstructure and magnetism of FeCo-SiO2 nano-granular films for high frequency application
[J].
Ge, Shihui
;
Yao, Dongsheng
;
Yamaguchi, Masahiro
;
Yang, Xiaolin
;
Zuo, Huaping
;
Ishii, Takeshi
;
Zhou, Dong
;
Li, Fashen
.
JOURNAL OF PHYSICS D-APPLIED PHYSICS,
2007, 40 (12)
:3660-3664

Ge, Shihui
论文数: 0 引用数: 0
h-index: 0
机构:
Lanzhou Univ, Minist Educ, Key Lab Magnetism & Magnet Mat, Lanzhou 730000, Peoples R China Lanzhou Univ, Minist Educ, Key Lab Magnetism & Magnet Mat, Lanzhou 730000, Peoples R China

Yao, Dongsheng
论文数: 0 引用数: 0
h-index: 0
机构: Lanzhou Univ, Minist Educ, Key Lab Magnetism & Magnet Mat, Lanzhou 730000, Peoples R China

Yamaguchi, Masahiro
论文数: 0 引用数: 0
h-index: 0
机构: Lanzhou Univ, Minist Educ, Key Lab Magnetism & Magnet Mat, Lanzhou 730000, Peoples R China

Yang, Xiaolin
论文数: 0 引用数: 0
h-index: 0
机构: Lanzhou Univ, Minist Educ, Key Lab Magnetism & Magnet Mat, Lanzhou 730000, Peoples R China

Zuo, Huaping
论文数: 0 引用数: 0
h-index: 0
机构: Lanzhou Univ, Minist Educ, Key Lab Magnetism & Magnet Mat, Lanzhou 730000, Peoples R China

Ishii, Takeshi
论文数: 0 引用数: 0
h-index: 0
机构: Lanzhou Univ, Minist Educ, Key Lab Magnetism & Magnet Mat, Lanzhou 730000, Peoples R China

Zhou, Dong
论文数: 0 引用数: 0
h-index: 0
机构: Lanzhou Univ, Minist Educ, Key Lab Magnetism & Magnet Mat, Lanzhou 730000, Peoples R China

Li, Fashen
论文数: 0 引用数: 0
h-index: 0
机构: Lanzhou Univ, Minist Educ, Key Lab Magnetism & Magnet Mat, Lanzhou 730000, Peoples R China
[8]
[Fe80Ni20-O/SiO2]n Multilayer thin films for applications in GHz range
[J].
Geng, H.
;
Wei, J. Q.
;
Nie, S. J.
;
Wang, Y.
;
Wang, Z. W.
;
Wang, L. S.
;
Chen, Y.
;
Peng, D. L.
;
Li, F. S.
;
Xue, D. S.
.
MATERIALS LETTERS,
2013, 92
:346-349

Geng, H.
论文数: 0 引用数: 0
h-index: 0
机构:
Xiamen Univ, Dept Mat Sci & Engn, Coll Mat, Xiamen 361005, Peoples R China Xiamen Univ, Dept Mat Sci & Engn, Coll Mat, Xiamen 361005, Peoples R China

Wei, J. Q.
论文数: 0 引用数: 0
h-index: 0
机构:
Xiamen Univ, Dept Mat Sci & Engn, Coll Mat, Xiamen 361005, Peoples R China Xiamen Univ, Dept Mat Sci & Engn, Coll Mat, Xiamen 361005, Peoples R China

Nie, S. J.
论文数: 0 引用数: 0
h-index: 0
机构:
Xiamen Univ, Dept Mat Sci & Engn, Coll Mat, Xiamen 361005, Peoples R China Xiamen Univ, Dept Mat Sci & Engn, Coll Mat, Xiamen 361005, Peoples R China

Wang, Y.
论文数: 0 引用数: 0
h-index: 0
机构:
Xiamen Univ, Dept Mat Sci & Engn, Coll Mat, Xiamen 361005, Peoples R China Xiamen Univ, Dept Mat Sci & Engn, Coll Mat, Xiamen 361005, Peoples R China

Wang, Z. W.
论文数: 0 引用数: 0
h-index: 0
机构:
Xiamen Univ, Dept Mat Sci & Engn, Coll Mat, Xiamen 361005, Peoples R China Xiamen Univ, Dept Mat Sci & Engn, Coll Mat, Xiamen 361005, Peoples R China

Wang, L. S.
论文数: 0 引用数: 0
h-index: 0
机构:
Xiamen Univ, Dept Mat Sci & Engn, Coll Mat, Xiamen 361005, Peoples R China Xiamen Univ, Dept Mat Sci & Engn, Coll Mat, Xiamen 361005, Peoples R China

Chen, Y.
论文数: 0 引用数: 0
h-index: 0
机构:
Xiamen Univ, Dept Mat Sci & Engn, Coll Mat, Xiamen 361005, Peoples R China Xiamen Univ, Dept Mat Sci & Engn, Coll Mat, Xiamen 361005, Peoples R China

Peng, D. L.
论文数: 0 引用数: 0
h-index: 0
机构:
Xiamen Univ, Dept Mat Sci & Engn, Coll Mat, Xiamen 361005, Peoples R China Xiamen Univ, Dept Mat Sci & Engn, Coll Mat, Xiamen 361005, Peoples R China

Li, F. S.
论文数: 0 引用数: 0
h-index: 0
机构:
Lanzhou Univ, MOE, Key Lab Magnetism & Magnet Mat, Lanzhou 730000, Peoples R China Xiamen Univ, Dept Mat Sci & Engn, Coll Mat, Xiamen 361005, Peoples R China

Xue, D. S.
论文数: 0 引用数: 0
h-index: 0
机构:
Lanzhou Univ, MOE, Key Lab Magnetism & Magnet Mat, Lanzhou 730000, Peoples R China Xiamen Univ, Dept Mat Sci & Engn, Coll Mat, Xiamen 361005, Peoples R China
[9]
Nanostructured magnetic Fe-Ni-Co/Teflon multilayers for high-frequency applications in the gigahertz range
[J].
Greve, Henry
;
Pochstein, Christian
;
Takele, Haile
;
Zaporojtchenko, Vladimir
;
Faupel, Franz
;
Gerber, Andreas
;
Frommberger, Michael
;
Quandt, Eckhard
.
APPLIED PHYSICS LETTERS,
2006, 89 (24)

Greve, Henry
论文数: 0 引用数: 0
h-index: 0
机构: Univ Kiel, Fac Engn, Chair Multicomponent Mat, D-24143 Kiel, Germany

Pochstein, Christian
论文数: 0 引用数: 0
h-index: 0
机构: Univ Kiel, Fac Engn, Chair Multicomponent Mat, D-24143 Kiel, Germany

Takele, Haile
论文数: 0 引用数: 0
h-index: 0
机构: Univ Kiel, Fac Engn, Chair Multicomponent Mat, D-24143 Kiel, Germany

Zaporojtchenko, Vladimir
论文数: 0 引用数: 0
h-index: 0
机构: Univ Kiel, Fac Engn, Chair Multicomponent Mat, D-24143 Kiel, Germany

Faupel, Franz
论文数: 0 引用数: 0
h-index: 0
机构: Univ Kiel, Fac Engn, Chair Multicomponent Mat, D-24143 Kiel, Germany

Gerber, Andreas
论文数: 0 引用数: 0
h-index: 0
机构: Univ Kiel, Fac Engn, Chair Multicomponent Mat, D-24143 Kiel, Germany

Frommberger, Michael
论文数: 0 引用数: 0
h-index: 0
机构: Univ Kiel, Fac Engn, Chair Multicomponent Mat, D-24143 Kiel, Germany

Quandt, Eckhard
论文数: 0 引用数: 0
h-index: 0
机构: Univ Kiel, Fac Engn, Chair Multicomponent Mat, D-24143 Kiel, Germany
[10]
GRAIN-STRUCTURE AND MAGNETISM OF NANOCRYSTALLINE FERROMAGNETS
[J].
HERZER, G
.
IEEE TRANSACTIONS ON MAGNETICS,
1989, 25 (05)
:3327-3329

HERZER, G
论文数: 0 引用数: 0
h-index: 0