Stoichiometry, phase, and texture evolution in PLD-Grown hexagonal barium ferrite films as a function of laser process parameters

被引:41
作者
Yu, Chengju [1 ,2 ]
Sokolov, Alexander S. [1 ,2 ]
Kulik, Piotr [1 ,2 ]
Harris, Vincent G. [1 ,2 ]
机构
[1] Northeastern Univ, Dept Elect & Comp Engn, Boston, MA 02115 USA
[2] Northeastern Univ, Ctr Microwave Magnet Mat & Integrated Circuits CM, Boston, MA 02115 USA
关键词
Pulsed laser deposition; Hexaferrite film; Perpendicular magnetic anisotropy; HEXAFERRITE THIN-FILMS; MAGNETIC-PROPERTIES; STRUCTURAL-PROPERTIES; DEPOSITION; FLUENCE; PRESSURE; ABLATION;
D O I
10.1016/j.jallcom.2019.152301
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Barium hexaferrite (BaFe12O19 or BaM) films were grown on c-plane sapphire (0001) substrates by pulsed laser deposition (PLD) to evaluate the effects of laser fluence on their composition, structure, and magnetic properties. A Continuum Surelite pulsed 266 nm Nd:YAG laser was employed, and the laser fluence was varied systemically between 1 and 5.7 [J/cm(2)]. As the laser fluence changed the stoichiometric transfer between the BaM targets and deposited thin films were affected. The Fe to Ba ratio in the films increased with laser fluence. The films deposited at laser fluences below 4 J/cm(2) showed undesirable 3-dimensional island growth. Moreover, an insufficient laser energy resulted in deposition of secondary phases corresponding to Barium monoferrite (BaFe2O4) and Magnetite (Fe3O4). Alternatively, laser fluences above 5 J/cm(2) promoted resputtering of the growing film at the substrate and degraded film quality, structure, and magnetic properties. BaM films deposited at 4.8 J/cm(2) - the optimal laser fluence - showed excellent c-axis orientation perpendicular to the film plane with an anisotropy field of 16 kOe and saturation magnetization of 4.39 kG. These results clearly demonstrate a strong influence of laser parameters on PLD-grown hexaferrite films and provide a path for high-yield production using pulsed laser depositions systems. (C) 2019 Elsevier B.V. All rights reserved.
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页数:8
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