Femtosecond laser induced refractive index modifications for fabrication of three-dimensional integrated optical devices

被引：1
作者：
Will, M [1 ]
Burghoff, J [1 ]
Nolte, S [1 ]
Tuennermann, A [1 ]
机构：
[1] Univ Jena, Inst Appl Phys, D-6900 Jena, Germany
来源：
LASER MICROMACHINING FOR OPTOELECTRONIC DEVICE FABRICATION | 2003年 / 4941卷
关键词：
ultrashort laser pulses; microstructuring; waveguides; integrated optics;
D O I：
10.1117/12.468496
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We present the fabrication of three-dimensional waveguide structures indide fused silica using the femtosecond laser direct-writing technique. The guiding properties of a produced 1 x 3 splitter are studied in detail. By appropriate choice of the processing parameters a multimode entrance port can be generated which allows to vary the splitting ratio by changing the input coupling. The processing requirements for such splitter devices will-be discussed.
引用
收藏
页码：58 / 64
页数：7
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