Determination of the pHpzc of insulators surface from capacitance-voltage characteristics of MIS and EIS structures

被引：57

作者：

Poghossian, AA ^{[1
]}

机构：

[1] State Engn Univ Armenia, Yerevan 375009, Armenia

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 1997年 / 44卷 / 1-3期

关键词：

pH(pzc); electrolyte-insulator-semiconductor structure; capacitance-voltage characteristics;

D O I：

10.1016/S0925-4005(97)00156-1

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

A new method for determination of pH(pzc) from capacitance-voltage characteristics of MIS and EIS structures is suggested. The obtained values of the pH(pzc) (2.5 +/- 0.3 for SiO2, 2.8 +/- 0.3 for Ta2O5, 3-3.3 for Si3N4 films) agree well with results obtained from flat-plate streaming potential measurements. (C) 1997 Elsevier Science S.A.

引用

收藏

页码：551 / 553

页数：3

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