Effect of pulse width and fluence of femtosecond laser on the size of nanobump array

被引:91
作者
Nakata, Yoshiki
Miyanaga, Noriaki
Okada, Tatsuo
机构
[1] Osaka Univ, Inst Laser Engn, Suita, Osaka 5650871, Japan
[2] Kyushu Univ, Grad Sch Informat Sci & Elect Engn, Higashi Ku, Fukuoka 8128581, Japan
关键词
femtosecond laser; interference; laser modification; laser ablation; thin film; nanomaterial; nanobump; array;
D O I
10.1016/j.apsusc.2007.01.080
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Conical nanobump arrays were generated on gold thin film processed by interfering femtosecond laser. The transition of the height and diameter as functions of fluence and pulse width was investigated. When the fluence was 87 mJ/cm(2), the height and diameter were not so different at 350 fs or shorter pulse width. They decreased at longer pulse width, and no bump could be generated over 1.6 ps. The results suggest the decrease of size is due to the diffusion of electron to not-excited region, and due to heat conduction to not heated region or substrate, or change of absorbance of laser. At long pulse width of 2.4 ps and relatively higher fluence of 190 mJ/cm(2), nanobump had liquid-like structure as a stop motion of a water drop. (C) 2007 Elsevier B.V. All rights reserved.
引用
收藏
页码:6555 / 6557
页数:3
相关论文
共 12 条
[1]   INTENSITY-DEPENDENT ABSORPTION IN 10.6-MU-M LASER-ILLUMINATED SPHERES [J].
BACH, DR ;
CASPERSON, DE ;
FORSLUND, DW ;
GITOMER, SJ ;
GOLDSTONE, PD ;
HAUER, A ;
KEPHART, JF ;
KINDEL, JM ;
KRISTAL, R ;
KYRALA, GA ;
MITCHELL, KB ;
VANHULSTEYN, DB ;
WILLIAMS, AH .
PHYSICAL REVIEW LETTERS, 1983, 50 (26) :2082-2085
[2]   SILICON QUANTUM WIRE ARRAY FABRICATION BY ELECTROCHEMICAL AND CHEMICAL DISSOLUTION OF WAFERS [J].
CANHAM, LT .
APPLIED PHYSICS LETTERS, 1990, 57 (10) :1046-1048
[3]   PHOTOSENSITIVITY IN OPTICAL FIBER WAVEGUIDES - APPLICATION TO REFLECTION FILTER FABRICATION [J].
HILL, KO ;
FUJII, Y ;
JOHNSON, DC ;
KAWASAKI, BS .
APPLIED PHYSICS LETTERS, 1978, 32 (10) :647-649
[4]   HELICAL MICROTUBULES OF GRAPHITIC CARBON [J].
IIJIMA, S .
NATURE, 1991, 354 (6348) :56-58
[5]   Femtosecond-laser-encoded distributed-feedback color center laser in lithium fluoride single crystal [J].
Kawamura, Ken-ich ;
Hirano, Masahiro ;
Kamiya, Toshio ;
Hosono, Heido .
JOURNAL OF NON-CRYSTALLINE SOLIDS, 2006, 352 (23-25) :2347-2350
[6]   Formation of microbumps and nanojets on gold targets by femtosecond laser pulses [J].
Korte, F ;
Koch, J ;
Chichkov, BN .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2004, 79 (4-6) :879-881
[7]  
Nakata Y, 2003, JPN J APPL PHYS 2, V42, pL1452, DOI [10.1143/JJAP.42.L1452, 10.1143/JJAp.42.L1452]
[8]   Lines of periodic hole structures produced by laser ablation using interfering femtosecond lasers split by a transmission grating [J].
Nakata, Y ;
Okada, T ;
Maeda, M .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2003, 77 (3-4) :399-401
[9]   Formation of periodic structure inside silica glass and acryl by interfering femtosecond laser [J].
Nakata, Y ;
Okada, T ;
Maeda, M .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 2003, 42 (4A) :L379-L380
[10]   Fabrication of dot matrix, comb, and nanowire structures using laser ablation by interfered femtosecond laser beams [J].
Nakata, Y ;
Okada, T ;
Maeda, M .
APPLIED PHYSICS LETTERS, 2002, 81 (22) :4239-4241