Diamond-sensing microdevices for environmental control and analytical applications

For the fabrication of microdevices with line widths approching 1 mu m, a patterning methodology has been developed by the modification of an existing plasma etching process, which is suitable for any form and type of diamond. These microdevices have been tested as active sensing elements for both environmental control and metrological applications: voltammetric detection of chlorine, detection of atomic oxygen for space and terrestrial applications, the measurement of ultraviolet (UV) light, and finally, conductive atomic force microscopy (AFM), which is successfully performed today with microfabricated diamond tips. (C) 1998 Elsevier Science S.A.