Support loss in the radial bulk-mode vibrations of center-supported micromechanical disk resonators

被引：55

作者：

Hao, Zhili ^{[1
]}

Ayazi, Farrokh ^{[1
]}

机构：

[1] Georgia Inst Technol, Sch Elect & Comp Engn, Atlanta, GA 30332 USA

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2007年 / 134卷 / 02期

基金：

美国国家科学基金会;

关键词：

disk resonators; radial bulk-mode; support loss; quality factor (Q); elastic waves; semi-infinite medium;

D O I：

10.1016/j.sna.2006.05.020

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents a comprehensive analysis of support loss, the dominant loss mechanism, in center-supported micromechanical disk resonators operating in their radial bulk-modes. Through separation and coupling between the three components (disk, support beam, and support structure) of a disk resonator, support loss is evaluated quantitatively and the closed-form expression is obtained for support quality factor (Q(support)) of a center-supported disk resonator. The comparison between theoretical analysis and experimental data shows good agreement. This work provides significant insights into the geometrical design and choice of materials in high-Q center-supported disk resonant structures. To minimize support loss, a quarter wavelength rule exists for the height of the support beam in a center-supported disk resonator, similar to the length of torsion support beams of a free-free flexural beam resonator. (c) 2006 Elsevier B.V. All rights reserved.

引用

页码：582 / 593

页数：12

共 10 条

[1]

Clark JR, 2003, P IEEE INT FREQ CONT, P802

[2] Support loss in micromechanical disk resonators [J].

Hao, ZL ;

Ayazi, F .

MEMS 2005 Miami: Technical Digest, 2005, :137-141

[3] An analytical model for support loss in micromachined beam resonators with in-plane flexural vibrations [J].

Hao, ZL ;

Erbil, A ;

Ayazi, F .

SENSORS AND ACTUATORS A-PHYSICAL, 2003, 109 (1-2) :156-164

[4]

Hsu WT, 2000, INTERNATIONAL ELECTRON DEVICES MEETING 2000, TECHNICAL DIGEST, P399, DOI 10.1109/IEDM.2000.904340

[5] THE FIELD AND RADIATION IMPEDANCE OF MECHANICAL RADIATORS ON THE FREE SURFACE OF A SEMI-INFINITE ISOTROPIC SOLID [J].

MILLER, GF ;

PURSEY, H .

PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL AND PHYSICAL SCIENCES, 1954, 223 (1155) :521-541

[6] Elastic, mechanical, and thermal properties of nanocrystalline diamond films [J].

Philip, J ;

Hess, P ;

Feygelson, T ;

Butler, JE ;

Chattopadhyay, S ;

Chen, KH ;

Chen, LC .

JOURNAL OF APPLIED PHYSICS, 2003, 93 (04) :2164-2171

[7] 1.51-GHz nanocrystalline diamond micromechanical disk resonator with material-mismatched isolating support [J].

Wang, J ;

Butler, JE ;

Feygelson, T ;

Nguyen, CTC .

MEMS 2004: 17TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2004, :641-644

[8]

Wang J, 2003, IEEE RAD FREQ INTEGR, P335, DOI 10.1109/RFIC.2003.1213956

[9] VHF free-free beam high-Q micromechanical resonators [J].

Wang, K ;

Wong, AC ;

Nguyen, CTC .

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2000, 9 (03) :347-360

[10]

Yong Warren C., 1989, ROARKS FORMULAS STRE

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