Organoaluminophosphate sol-gel silica glass thin films for integrated optics

被引：7
|
作者：
Touam, T
Milova, G
Saddiki, Z
Fardad, MA
Andrews, MP
Chrostowski, J
Najafi, SI [1 ]
机构：
[1] Ecole Polytech, Photon Res Grp, Montreal, PQ H3C 3A7, Canada
[2] McGill Univ, Dept Chem, Montreal, PQ H3A 2K6, Canada
[3] Natl Res Council Canada, Ottawa, ON K1A 0R6, Canada
来源：
THIN SOLID FILMS | 1997年 / 307卷 / 1-2期
基金：
加拿大自然科学与工程研究理事会;
关键词：
D O I：
10.1016/S0040-6090(97)00232-0
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
We report on the fabrication and characterization of waveguide thin films on silicon by ultraviolet-light imprinting in a new photosensitive, organically modified aluminophosphate sol-gel silica glass prepared by a one-step dip-coating process. The effect of fabrication parameters such as dip-coating speed, bake temperature, ultraviolet-light exposure time and sol age on the thin film characteristics (thickness, refractive index and birefringence) are studied. Appropriate combinations of ultraviolet-light exposure time, sol-gel film thickness and postbake parameters produce waveguides suitable for optical telecommunication applications. (C) 1997 Elsevier Science S.A.
引用
收藏
页码：203 / 207
页数：5
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