Effects of mixed abrasive grits in slurries on free abrasive machining (FAM) processes

被引:30
作者
Bhagavat, Sumeet [1 ]
Liberato, Juan Carlos [1 ]
Chung, Chunhui [1 ]
Kao, Imin [1 ]
机构
[1] SUNY Stony Brook, Dept Mech Engn, Mfg Automat Lab, Stony Brook, NY 11794 USA
基金
美国国家科学基金会;
关键词
Lapping; Silicon wafer; Wafer production; Grain size transition; Mixed abrasive grits in slurries; Three-body abrasion; BRITTLE MATERIALS; INDENTATION; ANISOTROPY;
D O I
10.1016/j.ijmachtools.2010.04.006
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Effects of mixed abrasive grits in slurries on free abrasive machining (FAM) processes are studied using a single-sided lapping machine. Impacts of mixing abrasives on various parameters such as amount of material removed, material removal rate, surface roughness, particle size distribution and relative angular velocity are studied. The material removed is monitored as a function of time. The experimental results suggest that (i) mixing abrasive grits can increase the amount of material removed, (ii) smaller abrasives can directly or indirectly affect the material removal process, (iii) slurries undergo severe grain size transition during lapping, and (iv) the surface roughness did not change significantly under different loading. The results of this study may have profound implication on the FAM processes that practitioners use today because the mixed abrasive grits increase material removal rate and reduce the grain size transition, while rendering similar surface roughness. (C) 2010 Elsevier Ltd. All rights reserved.
引用
收藏
页码:843 / 847
页数:5
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