3D Self-Assembled Microelectronic Devices: Concepts, Materials, Applications

被引:95
作者
Karnaushenko, Daniil [1 ]
Kong, Tong [1 ]
Bandari, Vineeth K. [1 ,2 ,3 ]
Zhu, Feng [1 ,2 ,3 ]
Schmidt, Oliver G. [1 ,2 ,3 ,4 ]
机构
[1] Leibniz IFW Dresden, Inst Integrat Nanosci, D-01069 Dresden, Germany
[2] Tech Univ Chemnitz, Mat Syst Nanoelect, D-09107 Chemnitz, Germany
[3] TU Chemnitz, Res Ctr Mat Architectures & Integrat Nanomembrane, Rosenbergstr 6, D-09126 Chemnitz, Germany
[4] Tech Univ Dresden, Sch Sci, D-01062 Dresden, Germany
关键词
3D geometry; microelectronics; self-assembly; shapeable materials; strain engineering; FIELD-EFFECT TRANSISTORS; ROLLED-UP NANOMEMBRANES; THIN-FILM-TRANSISTOR; SURFACE-TENSION; ON-CHIP; THERMAL-EXPANSION; CHARGE-TRANSPORT; LIQUID-CRYSTALS; POLYMER; MICRO;
D O I
10.1002/adma.201902994
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Modern microelectronic systems and their components are essentially 3D devices that have become smaller and lighter in order to improve performance and reduce costs. To maintain this trend, novel materials and technologies are required that provide more structural freedom in 3D over conventional microelectronics, as well as easier parallel fabrication routes while maintaining compatability with existing manufacturing methods. Self-assembly of initially planar membranes into complex 3D architectures offers a wealth of opportunities to accommodate thin-film microelectronic functionalities in devices and systems possessing improved performance and higher integration density. Existing work in this field, with a focus on components constructed from 3D self-assembly, is reviewed, and an outlook on their application potential in tomorrow's microelectronics world is provided.
引用
收藏
页数:30
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