Residual stresses in Pb(Zr0.52Ti0.48)O3 thin films deposited by metal organic decomposition

被引：37
|
作者：
Zheng, XJ [1 ]
Yang, ZY [1 ]
Zhou, YC [1 ]
机构：
[1] Xiangtan Univ, Inst Fundamental Mech & Mat Engn, Xiangtan 411105, Peoples R China
来源：
SCRIPTA MATERIALIA | 2003年 / 49卷 / 01期
关键词：
ferroelectric thin film; X-ray diffraction; Vickers indentation; residual stresses;
D O I：
10.1016/S1359-6462(03)00181-7
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Pb(Zr0.52Ti0.48)O-3 (PZT) ferroelectric thin films were prepared by metal organic decomposition (MOD). The residual stress in the thin film was characterized by the X-ray diffraction. The indentation fracture method including the surface crack model and half-penny crack model was developed to analyze residual stress in the thin film. (C) 2003 Acta Materialia Inc. Published by Elsevier Science Ltd. All rights reserved.
引用
收藏
页码：71 / 76
页数：6
相关论文
共 50 条
  • [31] Pb(Zr0.52Ti0.48)O3 films on stainless steel by chemical solution deposition
    Özenbas, M
    Yildirim, A
    EURO CERAMICS VIII, PTS 1-3, 2004, 264-268 : 1217 - 1220
  • [32] Residual stress analysis in ferroelectric Pb(Zr0.52Ti0.48)O3 thin films fabricated by a sol-gel process
    Yao, K
    Yu, SH
    Tay, FEH
    APPLIED PHYSICS LETTERS, 2003, 82 (25) : 4540 - 4542
  • [33] Directional enhancement of pyroelectricity in Pb(Zr0.52Ti0.48)O3 films by DC poling
    Usami, J.
    Okamoto, Y.
    Inoue, H.
    Makimoto, N.
    Kobayashi, T.
    Yamada, H.
    APPLIED PHYSICS LETTERS, 2025, 126 (09)
  • [34] Ultraviolet-assisted cold poling of Pb(Zr0.52Ti0.48)O3 films
    Zhu, Wanlin
    Luo, Wei
    Akkopru-Akgun, Betul
    Lanagan, Michael
    Randall, Clive A.
    Trolier-McKinstry, Susan
    JOURNAL OF MATERIALS SCIENCE, 2018, 53 (10) : 7180 - 7186
  • [35] Ultraviolet-assisted cold poling of Pb(Zr0.52Ti0.48)O3 films
    Wanlin Zhu
    Wei Luo
    Betul Akkopru-Akgun
    Michael Lanagan
    Clive A. Randall
    Susan Trolier-McKinstry
    Journal of Materials Science, 2018, 53 : 7180 - 7186
  • [36] Ferroelectric properties of the flexible Pb(Zr0.52Ti0.48)O3 thin film on mica
    Hongyan Qi
    Xin Xia
    Changlin Zhou
    Pengcheng Xiao
    Yun Wang
    Yongju Deng
    Journal of Materials Science: Materials in Electronics, 2020, 31 : 3042 - 3047
  • [37] Influences of sol-gel derived thin Pb(Zr0.52Ti0.48)O-3 layers as a buffer on RF sputtered Pb(Zr0.52Ti0.48)O-3 thin films
    Kim, TS
    Kim, JH
    Lee, JK
    Jung, HJ
    INTEGRATED FERROELECTRICS, 1995, 10 (1-4) : 55 - 61
  • [38] Preparation and electrical properties of Pb(Zr0.52Ti0.48)O3 films deposited on LaNiO3 and Pt electrodes
    Zhao, Quan-Liang, 1600, Journal of Functional Materials (45):
  • [39] TRANSMISSION ELECTRON-MICROSCOPY OF PB(ZR0.52TI0.48)O3
    GOO, EKW
    MISHRA, RK
    THOMAS, G
    JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1981, 64 (09) : 517 - 519
  • [40] Growth model of epitaxial Pb(Zr0.52Ti0.48)O3 nanoislands
    Chu, MW
    Szafraniak, I
    Scholz, R
    Hesse, D
    Alexe, M
    Gösele, U
    FERROELECTRIC THIN FILMS XII, 2004, 784 : 9 - 12
12345