Residual stresses in Pb(Zr0.52Ti0.48)O3 thin films deposited by metal organic decomposition

被引：37
作者：
Zheng, XJ [1 ]
Yang, ZY [1 ]
Zhou, YC [1 ]
机构：
[1] Xiangtan Univ, Inst Fundamental Mech & Mat Engn, Xiangtan 411105, Peoples R China
来源：
SCRIPTA MATERIALIA | 2003年 / 49卷 / 01期
基金：
中国国家自然科学基金;
关键词：
ferroelectric thin film; X-ray diffraction; Vickers indentation; residual stresses;
D O I：
10.1016/S1359-6462(03)00181-7
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Pb(Zr0.52Ti0.48)O-3 (PZT) ferroelectric thin films were prepared by metal organic decomposition (MOD). The residual stress in the thin film was characterized by the X-ray diffraction. The indentation fracture method including the surface crack model and half-penny crack model was developed to analyze residual stress in the thin film. (C) 2003 Acta Materialia Inc. Published by Elsevier Science Ltd. All rights reserved.
引用
收藏
页码：71 / 76
页数：6
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