A multilayer technology for high Tc dc SQUIDs

被引：0

作者：

IJsselsteijn, RPJ ^{[1
]}

Schultze, V ^{[1
]}

Zakosarenko, V ^{[1
]}

Morgenroth, W ^{[1
]}

Meyer, HG ^{[1
]}

机构：

[1] IPHT Jena, Dept Cryoelect, D-07702 Jena, Germany

来源：

APPLIED SUPERCONDUCTIVITY 1997, VOLS 1 AND 2: VOL 1: SMALL SCALE AND ELECTRONIC APPLICATIONS; VOL 2: LARGE SCALE AND POWER APPLICATIONS | 1997年 / 158期

关键词：

D O I：

暂无

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Multilayer structures like vias and cross-overs which are necessary for, e.g., de SQUIDs with monolithically integrated pick-up coils and multiturn input coils have been produced on SfTiO(3) (STO) substrates. Here, the YBa2Cu3O7-x, (YBCO) layers me separated by a STO isolating layer. The superconducting properties of the bottom YBCO layer, covered with a isolating STO and a second YBCO layer, were optimized by applying different cooling down procedures after deposition of the subsequent layers. A dry etching process resulting in beveled edges with angles below 10 degrees was developed The different basic elements needed for high T-c multilayer devices showed good superconducting properties.

引用

页码：687 / 690

页数：4