Interfacial Liquid Film Transfer Printing of Versatile Flexible Electronic Devices with High Yield Ratio

被引:15
作者
Chen, Yihao [1 ]
Liu, Xin [1 ]
Ma, Yinji [1 ]
Chen, Ying [2 ,3 ]
Lu, Bingwei [1 ]
Feng, Xue [1 ]
机构
[1] Tsinghua Univ, Ctr Flexible Elect Technol, Dept Engn Mech, Beijing 100084, Peoples R China
[2] Inst Flexible Elect Technol THU, Jiaxing 314000, Peoples R China
[3] Qiantang Sci & Technol Innovat Ctr, Hangzhou 310016, Peoples R China
基金
中国国家自然科学基金;
关键词
liquid film transfer printing; stress evolution visualization; trans‐ scale and multilayer devices; SENSORS; INTEGRATION; PRESSURE; SKIN;
D O I
10.1002/admi.202100287
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Emerging flexible electronic devices differ widely in terms of material, shape, scale, and structure. The conventional solid-contact stamp transfer printing method easily causes cracks and interfacial delamination in large-area, intricately-patterned multilayered devices. Liquid film transfer printing (LTP) is presented as a strategy to obtain flexible devices with a high yield ratio regardless of the device material, scale, shape, and structure. In this technique, the liquid film is used to hydrolyze and break the chemical bonds between the film and silicon wafer substrate. Thus, there is less stress on the device during the transfer process. In addition, the buoyancy and surface tension of the liquid film help the flexible device to unroll itself on the liquid surface. In the experiments, flexible devices of different types and with extreme properties consistently achieved a transfer printing yield ratio of 98.57%. The sensitivity of temperature sensor change before and after LTP is less than 2%. The real-time and visualized comparisons of the stress distribution and evolution during LTP and solid-contact methods demonstrated that the LTP maximum strain is 70% smaller than the latter method. Thus, LTP has great potential for sophisticated and system-level flexible device transfer printing and integration.
引用
收藏
页数:9
相关论文
共 61 条
[1]   Tattoo-Based Noninvasive Glucose Monitoring: A Proof-of-Concept Study [J].
Bandodkar, Amay J. ;
Jia, Wenzhao ;
Yardimci, Ceren ;
Wang, Xuan ;
Ramirez, Julian ;
Wang, Joseph .
ANALYTICAL CHEMISTRY, 2015, 87 (01) :394-398
[2]   Epidermal tattoo potentiometric sodium sensors with wireless signal transduction for continuous non-invasive sweat monitoring [J].
Bandodkar, Amay J. ;
Molinnus, Denise ;
Mirza, Omar ;
Guinovart, Tomas ;
Windmiller, Joshua R. ;
Valdes-Ramirez, Gabriela ;
Andrade, Francisco J. ;
Schoening, Michael J. ;
Wang, Joseph .
BIOSENSORS & BIOELECTRONICS, 2014, 54 :603-609
[3]   Wearable sweat sensors [J].
Bariya, Mallika ;
Nyein, Hnin Yin Yin ;
Javey, Ali .
NATURE ELECTRONICS, 2018, 1 (03) :160-171
[4]   Stretchable and self-healing polymers and devices for electronic skin [J].
Benight, Stephanie J. ;
Wang, Chao ;
Tok, Jeffrey B. H. ;
Bao, Zhenan .
PROGRESS IN POLYMER SCIENCE, 2013, 38 (12) :1961-1977
[5]  
Bower CA, 2015, ELEC COMP C, P963, DOI 10.1109/ECTC.2015.7159711
[6]   Review on flexible photonics/electronics integrated devices and fabrication strategy [J].
Cai, Shisheng ;
Han, Zhiyuan ;
Wang, Fengle ;
Zheng, Kunwei ;
Cao, Yu ;
Ma, Yinji ;
Feng, Xue .
SCIENCE CHINA-INFORMATION SCIENCES, 2018, 61 (06)
[7]   Directionally controlled transfer printing using micropatterned stamps [J].
Chen, Hang ;
Feng, Xue ;
Chen, Ying .
APPLIED PHYSICS LETTERS, 2013, 103 (15)
[8]   High-quality and efficient transfer of large-area graphene films onto different substrates [J].
Chen, Xu-Dong ;
Liu, Zhi-Bo ;
Zheng, Chao-Yi ;
Xing, Fei ;
Yan, Xiao-Qing ;
Chen, Yongsheng ;
Tian, Jian-Guo .
CARBON, 2013, 56 :271-278
[9]   Skin-like biosensor system via electrochemical channels for noninvasive blood glucose monitoring [J].
Chen, Yihao ;
Lu, Siyuan ;
Zhang, Shasha ;
Li, Yan ;
Qu, Zhe ;
Chen, Ying ;
Lu, Bingwei ;
Wang, Xinyan ;
Feng, Xue .
SCIENCE ADVANCES, 2017, 3 (12)
[10]   Biocompatible and Ultra-Flexible Inorganic Strain Sensors Attached to Skin for Long-Term Vital Signs Monitoring [J].
Chen, Yihao ;
Lu, Bingwei ;
Chen, Ying ;
Feng, Xue .
IEEE ELECTRON DEVICE LETTERS, 2016, 37 (04) :496-499