Thermal effect of TiC in the Mo/TiC/SiC system at elevated temperature

被引:3
|
作者
Roger, Jerome [1 ,2 ]
Audubert, Fabienne [2 ]
Le Petitcorps, Yann [1 ]
机构
[1] Univ Bordeaux 1, Lab Composites Thermostruct, UMR 5801, UB1 CNRS CEA Snecma Prop Solide, F-33600 Pessac, France
[2] Commissariat Energie Atom, DEN, DEC SPUA LTEC, F-13108 St Paul Les Durance, France
关键词
CVD; SiC; TiC; Molybdenum; Diffusion barrier; CHEMICAL-VAPOR-DEPOSITION; THERMODYNAMIC ANALYSIS; MECHANICAL-PROPERTIES; CARBON DIFFUSION; GROWTH-KINETICS; SILICON-CARBIDE; SIC COMPOSITES; INTERFACE; LAYER; MO;
D O I
10.1016/j.jallcom.2009.12.158
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
In this study, we examined the effect induced by the addition of a TiC interlayer on the stability of the Mo/SiC system at high temperature. Indeed, Mo/SiC couple is unstable at high temperature with formation of Mo2C and Mo5Si3Cx phases. In order to limit the degradation of Mo mechanical properties, a TiC film was inserted between Mo and SiC. Samples used in this work were prepared on metallic wires substrates, SiC and TiC being deposited by CVD. The protection given by TiC layer was considered in the 1473-1673K temperature range and for TIC thicknesses up to about 60 mu m. From our results, TiC is not effective enough to mitigate C and Si atoms diffusion. Nevertheless, a notable reduction of the reaction extent is obtained at any temperatures. The so-observed effect depends on the TiC thickness and the temperature. In actual fact, TiC efficiency increases when temperature and/or TiC layer thickness increases without reaching a complete protection. (C) 2010 Published by Elsevier B.V.
引用
收藏
页码:244 / 250
页数:7
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