Study on the drain bias effect on negative bias temperature instability degradation of an ultra-short p-channel metal-oxide-semiconductor field-effect transistor

被引:3
作者
Cao Yan-Rong [1 ]
Ma Xiao-Hua [2 ]
Hao Yue [2 ]
Hu Shi-Gang [2 ]
机构
[1] Xidian Univ, Sch Mechanoelect Engn, Xian 710071, Peoples R China
[2] Xidian Univ, Sch Microelect, Key Lab Wide Band Gap Semicond Mat & Devices, Xian 710071, Peoples R China
基金
中国国家自然科学基金;
关键词
negative bias temperature instability; drain bias; electric field; localized damage; TRAP GENERATION; INTERFACE; NBTI; RECOVERY;
D O I
10.1088/1674-1056/19/4/047307
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
This paper studies the effect of drain bias on ultra-short p-channel metal-oxide-semiconductor field-effect transistor (PMOSFET) degradation during negative bias temperature (NBT) stress. When a relatively large gate voltage is applied, the degradation magnitude is much more than the drain voltage which is the same as the gate voltage supplied, and the time exponent gets larger than that of the NBT instability (NBTI). With decreasing drain voltage, the degradation magnitude and the time exponent all get smaller. At some values of the drain voltage, the degradation magnitude is even smaller than that of NBTI, and when the drain voltage gets small enough, the exhibition of degradation becomes very similar to the NBTI degradation. When a relatively large drain voltage is applied, with decreasing gate voltage, the degradation magnitude gets smaller. However, the time exponent becomes larger. With the help of electric field simulation, this paper concludes that the degradation magnitude is determined by the vertical electric field of the oxide, the amount of hot holes generated by the strong channel lateral electric field at the gate/drain overlap region, and the time exponent is mainly controlled by localized damage caused by the lateral electric field of the oxide in the gate/drain overlap region where hot carriers are produced.
引用
收藏
页数:6
相关论文
共 15 条
[1]  
Cao YR, 2007, CHINESE PHYS, V16, P1140, DOI 10.1088/1009-1963/16/4/047
[2]  
CHAPARALA P, 2000, 95 IEEE IRW
[3]  
DOYLE BS, 1991, P IEDM, P529
[4]   A new drain voltage enhanced NBT1 degradation mechanism [J].
Jha, NK ;
Reddy, PS ;
Rao, VR .
2005 IEEE INTERNATIONAL RELIABILITY PHYSICS SYMPOSIUM PROCEEDINGS - 43RD ANNUAL, 2005, :524-528
[5]   A geometrical unification of the theories of NBTI and HCI time-exponents and its implications for ultra-scaled planar and surround-gate MOSFETs [J].
Kufluoglu, H ;
Alam, MA .
IEEE INTERNATIONAL ELECTRON DEVICES MEETING 2004, TECHNICAL DIGEST, 2004, :113-116
[6]   Study on self-healing effect in ultra deep submicron PMOSFET's [J].
Li Jing ;
Lu Hong-Xia ;
Hao Yue .
ACTA PHYSICA SINICA, 2006, 55 (05) :2508-2512
[7]   Mechanism of NBTI degradation in ultra deep submicron PMOSFET's [J].
Li, ZH ;
Liu, HX ;
Hao, Y .
ACTA PHYSICA SINICA, 2006, 55 (02) :820-824
[8]   Investigation and modeling of interface and bulk trap generation during negative bias temperature instability of p-MOSFETs [J].
Mahapatra, S ;
Kumar, PB ;
Alam, MA .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2004, 51 (09) :1371-1379
[9]   On the generation and recovery of interface traps in MOSFETs subjected to NBTI, FN, and HCI stress [J].
Mahapatra, Souvik ;
Saha, Dipankar ;
Varghese, Dhanoop ;
Kumar, P. Bharath .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2006, 53 (07) :1583-1592
[10]   Proton-induced defect generation at the Si-SiO2 interface [J].
Rashkeev, SN ;
Fleetwood, DM ;
Schrimpf, RD ;
Pantelides, ST .
IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 2001, 48 (06) :2086-2092