The formation of multi-axis micromechanical gyroscopes and accelerometers using surface micromachining

被引：2

作者：

Gusev, E. Yu ^{[1
]}

Jityaeva, J. Y. ^{[1
]}

Bykov, Al V. ^{[1
]}

机构：

[1] Southern Fed Univ, Inst Nanotechnol Elect & Elect Equipment Engn, Taganrog 347922, Russia

来源：

INTERNATIONAL CONFERENCE PHYSICA.SPB/2016 | 2017年 / 929卷

关键词：

POLYSILICON; MEMS; OXIDE;

D O I：

10.1088/1742-6596/929/1/012055

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The process flow of unified integral multi-axis micromechanical gyroscopes and accelerometers fabrication by surface micromachining was developed. The process flow for typical n-type silicon wafer Si (100) contains over 20 primary operations, including 5 lithography steps using 5 masks with minimum features size of 1 jam. Special operations were discussed. Experimental results of sacrificial SiO2 etching for poly-Si-on-SiO2 structures using buffered solution of hydrofluoric acid and ammonium fluoride (1:4) were obtained. The undercut etching rate was approximately of about 20 nm/sec and the minimum time required for sacrificial SiO2 removing under beams of 0.5-2.5 width was in in the range of 11 to 62.5 seconds. Finally two and three-axis micromechanical gyroscopes and accelerometers were fabricated.

引用

页数：5

共 16 条

[1] Fabrication of tunnelling gap of nanomechanicalaccelerometer by focused ion beam
Ageev, O. A.
Gusev, E. Yu
Kolomiytsev, A. S.
Lisitsyn, S. A.
Bykov, Al V.
[J]. 3RD INTERNATIONAL SCHOOL AND CONFERENCE ON OPTOELECTRONICS, PHOTONICS, ENGINEERING AND NANOSTRUCTURES (SAINT PETERSBURG OPEN 2016), 2016, 741
[2] Grain size and doping effect on structure and electromechanical properties of polycrystalline silicon for MEMS applications
Ageev, O. A.
Gusev, E. Yu
Jityaeva, J. Y.
Ilina, M. V.
Bykov, Al V.
[J]. 3RD INTERNATIONAL SCHOOL AND CONFERENCE ON OPTOELECTRONICS, PHOTONICS, ENGINEERING AND NANOSTRUCTURES (SAINT PETERSBURG OPEN 2016), 2016, 741
[3] A study of the formation modes of nanosized oxide structures of gallium arsenide by local anodic oxidation
Ageev, O. A.
Smirnov, V. A.
Solodovnik, M. S.
Rukomoikin, A. V.
Avilov, V. I.
[J]. SEMICONDUCTORS, 2012, 46 (13) : 1616 - 1621
[4] Ageev O.A., 2016, ADV MAT MANUFACTURIN, V2016, P563
[5] [Anonymous], 2002, MICROSYSTEM DESIGN
[6] Formation of a memristor matrix based on titanium oxide and investigation by probe-nanotechnology methods
Avilov, V. I.
Ageev, O. A.
Kolomiitsev, A. S.
Konoplev, B. G.
Smirnov, V. A.
Tsukanova, O. G.
[J]. SEMICONDUCTORS, 2014, 48 (13) : 1757 - 1762
[7] Surface science, MEMS and NEMS: Progress and opportunities for surface science research performed on, or by, microdevices
Berman, D.
Krim, J.
[J]. PROGRESS IN SURFACE SCIENCE, 2013, 88 (02) : 171 - 211
[8] CORE TA, 1993, SOLID STATE TECHNOL, V36, P39
[9] Polysilicon: a versatile material for microsystems
French, PJ
[J]. SENSORS AND ACTUATORS A-PHYSICAL, 2002, 99 (1-2) : 3 - 12
[10] Gusev E Yu, 2015, IZVESTIYA SFEDU ENG, V9, P126

← 1 2 →