A 3D Polymer Based Printed Two-Dimensional Laser Scanner

被引：4
|
作者：
Oyman, H. A. [1 ,2 ]
Gokdel, Y. D. [2 ]
Ferhanoglu, O. [3 ]
Yalcinkaya, A. D. [1 ]
机构：
[1] Bogazici Univ, Dept Elect & Elect Engn, TR-34342 Istanbul, Turkey
[2] Istanbul Bilgi Univ, Dept Elect & Elect Engn, TR-34060 Istanbul, Turkey
[3] Istanbul Tech Univ, Dept Elect & Commun Engn, TR-34469 Istanbul, Turkey
来源：
27TH MICROMECHANICS AND MICROSYSTEMS EUROPE WORKSHOP (MME 2016) | 2016年 / 757卷
关键词：
MICROSCOPE;
D O I：
10.1088/1742-6596/757/1/012024
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
A two-dimensional (2D) polymer based scanning mirror with magnetic actuation is developed for imaging applications. Proposed device consists of a circular suspension holding a rectangular mirror and can generate a 2D scan pattern. Three dimensional (3D) printing technology which is used for implementation of the device, offers added flexibility in controlling the cross-sectional profile as well as the stress distribution compared to the traditional planar process technologies. The mirror device is developed to meet a portable, miniaturized confocal microscope application in mind, delivering 4.5 and 4.8 degrees of optical scan angles at 111 and 267 Hz, respectively. As a result of this mechanical performance, the resulting microscope incorporating the mirror is estimated to accomplish a field of view (FOV) of 350 mu m x 350 mu m.
引用
收藏
页数：6
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