Development and control of a two DOF linear-angular precision positioning stage

被引：53

作者：

Clark, Leon ^{[1
]}

Shirinzadeh, Bijan ^{[1
]}

Bhagat, Umesh ^{[1
]}

Smith, Julian ^{[2
]}

Zhong, Yongmin ^{[3
]}

机构：

[1] Monash Univ, Dept Mech & Aerosp Engn, Robot & Mechatron Res Lab, Clayton, Vic 3800, Australia

[2] Monash Univ, Dept Surg, Clayton, Vic 3800, Australia

[3] RMIT Univ, Sch Aerosp Mech & Mfg Engn, Bundoora, Vic 3083, Australia

来源：

MECHATRONICS | 2015年 / 32卷

基金：

澳大利亚研究理事会;

关键词：

Micro nano positioning; Flexure-based mechanism; Sliding mode control; Adaptive control; MOTION TRACKING CONTROL; REPETITIVE CONTROL; DESIGN; DRIVEN; COMPENSATION; INVERSION; SYSTEM;

D O I：

10.1016/j.mechatronics.2015.10.001

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

This paper presents the mechanical design, optimisation and tracking control of a flexure-based positioning stage to generate coupled linear and angular motions. The mechanism employs two piezoelectric actuators, with output translation and rotation proportional to the difference and sum of the input displacements. Computational optimisation utilising finite element analysis is used to develop designs that maximise the working range. A dynamic model is developed, leading to the establishment of a proposed sliding mode controller to allow the stage to track desired trajectories. An adaptive gain is implemented to reduce errors in the estimated kinematics, and accommodate creep within the mechanism. A prototype of the mechanism has been manufactured, and experimentation has been performed to verify computational predictions of the mechanism behaviour. The ability of the proposed controller to execute precise tracking of a desired trajectory within the workspace is demonstrated in the experimental study. (C) 2015 Elsevier Ltd. All rights reserved.

引用

页码：34 / 43

页数：10