Electrical and optical properties of electron beam evaporated ITO thin films

被引:194
|
作者
George, J [1 ]
Menon, CS [1 ]
机构
[1] Mahatma Gandhi Univ, Sch Pure & Appl Phys, Kottayam, Kerala, India
关键词
thin films; electronic transport; optical properties;
D O I
10.1016/S0257-8972(00)00726-X
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Indium tin oxide (ITO) thin films were prepared on glass substrates by an electron beam evaporation technique from a mixture of In2O3 and SnO2. The films were annealed in air for 30 min at 350 degreesC. The electrical and optical properties of these films were investigated as a function of the substrate temperature. The films were deposited at substrate temperatures ranging from 50 to 350 degreesC at an oxygen partial pressure of 5 x 10(-5) mbar. The dopant concentration, resistivity, electrical conductivity, activation energy, optical transmission and band gap energy were investigated. It was found that the activation energy decreased with an increase in the film thickness. A transmittance value of 92% in the visible region of the spectrum and a resistivity of 3 x 10(-6) Omegam was obtained at a substrate temperature of 350 degreesC. Structural studies showed that the films were polycrystalline. (C) 2000 Elsevier Science S.A. All rights reserved.
引用
收藏
页码:45 / 48
页数:4
相关论文
共 50 条
  • [1] Structural, optical, and electrical properties of electron beam evaporated CdSe thin films
    Ahamed, M. G. Syed Basheer
    Balu, A. R.
    Nagarethinam, V. S.
    Thayumanavan, A.
    Murali, K. R.
    Sanjeeviraja, C.
    Jayachandran, M.
    CRYSTAL RESEARCH AND TECHNOLOGY, 2010, 45 (04) : 387 - 392
  • [2] Effect of annealing on the electrical and optical properties of electron beam evaporated ZnO thin films
    Al Asmar, R
    Ferblantier, G
    Mailly, F
    Gall-Borrut, P
    Foucaran, A
    THIN SOLID FILMS, 2005, 473 (01) : 49 - 53
  • [3] Optical and electrical measurements on electron beam evaporated CdTe thin films
    El-Rabeem, M. M. Abd
    Ali, H. M.
    El-Husainy, N. M.
    OPTOELECTRONICS AND ADVANCED MATERIALS-RAPID COMMUNICATIONS, 2009, 3 (06): : 533 - 538
  • [4] Structural, optical, electrical and luminescence properties of electron beam evaporated CdSe:In films
    Basheer, M. G. Syed Ahamed
    Rajni, K. S.
    Vidhya, V. S.
    Swaminathan, V.
    Thayumanavan, A.
    Murali, K. R.
    Jayachandran, M.
    CRYSTAL RESEARCH AND TECHNOLOGY, 2011, 46 (03) : 261 - 266
  • [5] Characterization of ITO/CdO/glass thin films evaporated by electron beam technique
    Mohamed, Hussein Abdel-Hafez
    Ali, Hazem Mahmoud
    SCIENCE AND TECHNOLOGY OF ADVANCED MATERIALS, 2008, 9 (02)
  • [6] Structural, Optical and Electrical Properties of ITO Thin Films
    Sofi, A. H.
    Shah, M. A.
    Asokan, K.
    JOURNAL OF ELECTRONIC MATERIALS, 2018, 47 (02) : 1344 - 1352
  • [7] Structural, Optical and Electrical Properties of ITO Thin Films
    A. H. Sofi
    M. A. Shah
    K. Asokan
    Journal of Electronic Materials, 2018, 47 : 1344 - 1352
  • [8] Investigation on annealing temperature-dependent optical properties of electron beam evaporated ZnSe thin films
    Ou, Kai
    Wang, Shenwei
    Bai, Liyuan
    Wang, Yu
    Zhang, Kexin
    Yi, Lixin
    THIN SOLID FILMS, 2019, 669 : 247 - 252
  • [9] Optical properties of electron beam evaporated Zn1-XTiXO thin films
    Pauline, G. Soniya
    Kaleemulla, S.
    INDIAN JOURNAL OF PHYSICS, 2024, 98 (06) : 2163 - 2179
  • [10] Optical properties of electron beam evaporated Zn1−XTiXO thin films
    G. Soniya Pauline
    S. Kaleemulla
    Indian Journal of Physics, 2024, 98 : 2163 - 2179