Design and characterisation of a compact 4-degree-of-freedom fast steering mirror system based on double Porro prisms for laser beam stabilization

被引:17
作者
Chang, Yu-Hao [1 ]
Hao, Guangbo [2 ]
Liu, Chien-Sheng [3 ]
机构
[1] Natl Chung Cheng Univ, Dept Mech Engn, 168 Univ Rd, Minhsiung Township 621301, Chiayi County, Taiwan
[2] Univ Coll Cork, Sch Engn, Elect Bldg 1-06,Coll Rd, Cork, Ireland
[3] Natl Cheng Kung Univ, Dept Mech Engn, 1 Univ Rd, Tainan 701, Taiwan
关键词
Fast steer mirror; Laser beam stabilization; Voice coil motor; 4 degree-of-freedom actuator; Flexure structure; VCM ACTUATOR; MAGNET;
D O I
10.1016/j.sna.2021.112639
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This paper proposes a 4-degree-of-freedom (DOF) actuator for a fast steer mirror (FSM) compensation system in order to compensate for 4-DOF laser errors. The mathematic system modeling was built to design and predict the performance of the proposed 4-DOF FSM. Finite element analysis was performed by using a commercial software to analyze the characteristics of the electromagnetic structure and mechanical structure for the proposed 4-DOF FSM. This study further verifies the properties of the proposed 4-DOF FSM by using a laboratory-built prototype. The proposed 4-DOF FSM has the travel range of +/- 5 mrad and +/- 0.04 mm along X and Y axes with accuracy of 0.025 mrad and 0.0012 mm and the bandwidth of rotational part and translational part are 10 Hz and 39 Hz, respectively. (c) 2021 Elsevier B.V. All rights reserved.
引用
收藏
页数:11
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