Fast determination of sample thickness through scanning moire fringes in scanning transmission electron microscopy

被引：2

作者：

Nan, Pengfei ^{[1
]}

Liang, Zhiyao ^{[1
]}

Zhang, Yue ^{[1
]}

Liu, Yangrui ^{[1
]}

Song, Dongsheng ^{[1
]}

Ge, Binghui ^{[1
]}

机构：

[1] Anhui Univ, Inst Phys Sci & Informat Technol, Key Lab Struct & Funct Regulat Hybrid Mat, Minist Educ,Informat Mat & Intelligent Sensing La, Hefei 230601, Peoples R China

来源：

MICRON | 2022年 / 155卷

基金：

中国国家自然科学基金;

关键词：

Thickness determination; Scanning moire fringes; Beam-sensitive materials; Scanning transmission electron microscopy; FERROELECTRICITY;

D O I：

10.1016/j.micron.2022.103230

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

Sample thickness is an important parameter in transmission electron microscopy (TEM) imaging for interpreting image contrast and understanding the relationship between properties and microstructure. In this study, we introduce a method for sample thickness determination in scanning TEM (STEM) mode based on scanning moire fringes (SMFs). Focal-series SMF imaging is used and sample thickness can be determined in situ at a medium magnification range, with beam damage and contamination avoided to a large extent. It provides a fast and convenient approach for determining sample thickness in TEM imaging, which is particularly useful for beamsensitive materials.

引用

页数：5

共 16 条

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