Growth of biaxially textured BaxPb1-xTiO3 ferroelectric thin films on amorphous Si3N4 -: art. no. 034103

被引:10
|
作者
Brewer, RT [1 ]
Boyd, DA [1 ]
El-Naggar, MY [1 ]
Boland, SW [1 ]
Park, YB [1 ]
Haile, SM [1 ]
Goodwin, DG [1 ]
Atwater, HA [1 ]
机构
[1] CALTECH, Div Engn & Appl Sci, Pasadena, CA 91125 USA
基金
美国国家科学基金会;
关键词
D O I
10.1063/1.1806994
中图分类号
O59 [应用物理学];
学科分类号
摘要
We prepared highly aligned, biaxially textured BaxPb1-xTiO3 (PBT) on amorphous Si3N4 by using an ion-beam-assisted deposited MgO as a template layer. PBT was deposited on a biaxially textured MgO using sol-gel synthesis, metal-organic chemical-vapor deposition, and molecular beam epitaxy. The biaxial texture of the PBT was inherited from the MgO template. The reflection high-energy electron diffraction (RHEED) and cross-section transmission electron microscopy (TEM) experiments suggest that exposure of the MgO template to atmospheric moisture before PBT heteroepitaxy resulted in a significant narrowing of the PBT in-plane orientation distribution. The microstructures of the biaxially textured PBT films were analyzed by x-ray diffraction, RHEED, and TEM. The dynamic contact mode electrostatic force microscopy polarization hysteresis loops confirmed that these films are ferroelectric. (C) 2004 American Institute of Physics.
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页数:8
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