Influence of annealing conditions on the optical and structural properties of spin-coated As2S3 chalcogenide glass thin films

被引：70

作者：

Song, Shanshan ^{[1
,2
]}

Dua, Janesha ^{[3
]}

Arnold, Craig B. ^{[1
,2
]}

机构：

[1] Princeton Univ, Dept Elect Engn, Princeton, NJ 08544 USA

[2] Princeton Univ, Princeton Inst Sci & Technol Mat, Princeton, NJ 08544 USA

[3] CALTECH, Dept Elect Engn, Pasadena, CA 91125 USA

来源：

OPTICS EXPRESS | 2010年 / 18卷 / 06期

基金：

美国国家科学基金会;

关键词：

WAVE-GUIDES; AMORPHOUS SEMICONDUCTORS; DEPOSITION; CONSTANTS; THICKNESS; BEHAVIOR;

D O I：

10.1364/OE.18.005472

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Spin-coating of chalcogenide glass is a low-cost, scalable method to create optical grade thin films, which are ideal for visible and infrared applications. In this paper, we study the influence of annealing on optical parameters of As2S3 films by examining UV-visible and infrared spectroscopy and correlating the results to changes in the physical properties associated with solvent removal. Evaporation of excess solvent results in a more highly coordinated, denser glass network with higher index and lower absorption. Depending on the annealing temperature and time, index values ranging from n = 2.1 to the bulk value (n = 2.4) can be obtained, enabling a pathway to materials optimization. (C) 2010 Optical Society of America

引用

页码：5472 / 5480

页数：9

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