MEMS Accelerometers Production Technological Route Selection

被引：0

作者：

Nevludov, Igor ^{[1
]}

Yevsieiev, Vladyslav ^{[1
]}

Bortnikova, Viktoriia ^{[1
]}

Miliutina, Svitlana ^{[1
]}

机构：

[1] Kharkiv Natl Univ Radio Elect, CITAM Dept, Ave Nauki 14, Kharkov, Ukraine

来源：

2017 14TH INTERNATIONAL CONFERENCE: THE EXPERIENCE OF DESIGNING AND APPLICATION OF CAD SYSTEMS IN MICROELECTRONICS (CADSM) | 2017年

关键词：

accelerometer; microelectromechanical systems; technological process; cluster analysis; computer modeling; dendrogram; Ward's methods; routing;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

MEMS accelerometers production technological route selection method is proposed in the paper. It's implemented using developed grouping method for MEMS accelerometers with similar design and process parameters. As a practical result MEMS accelerometers production technological route generalized structure manufacturing of technological is proposed. Proposed method results allow to automate MEMS accelerometers production technological route design process.

引用

页码：424 / 427

页数：4