MEMS for Integrated Timing and Spectral Processing

被引：34

作者：

Ayazi, Farrokh ^{[1
]}

机构：

[1] Georgia Inst Technol, Ctr MEMS & Microsyst Technol, Atlanta, GA 30332 USA

来源：

PROCEEDINGS OF THE IEEE 2009 CUSTOM INTEGRATED CIRCUITS CONFERENCE | 2009年

关键词：

SILICON; RESONATORS;

D O I：

10.1109/CICC.2009.5280888

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents a review of micro-electromechanical devices for frequency references and RF spectral processing. The application of high-Q pure silicon and AlN-on-silicon bulk acoustic wave resonators in low phase-noise reference oscillators is discussed and compensation challenges are described. Low-loss piezo-acoustic filters and high-Q tunable and switchable silver passives are presented for applications in multi-mode front-end modules and spectral processors.

引用

页码：65 / 72

页数：8

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